SussPA300UserGuide - 第36页

SUSS / PA300 / User Manual / M10-121841-00 / February 2002 35 REAL POS switches the display to the stage position in µm from the home position. F1 displays the X distance, F2 the Y value and F3, the Z position QUIET swit…

SUSS / PA300 / User Manual / M10-121841-00 / February 2002

7.3.2 F1-F3 Function Keys

Key LEDs F1 F2 F3

Off-off

Off-on

On-off

On-on

ALIGN

SET CONT / SET FOC

REMOTE

IDX POS

GO HOME

Z UP

THETA

REAL POS

SET HOME Z

DOWN

INDEX

QUIET / TURRET

ALIGN redefines the keys as CANCEL, MARK 1 and MARK 2, and starts the 2-point

alignment process.

1. To begin, position the wafer stage near the left (right) edge of the wafer so a

horizontal street or feature is aligned with a crosshair or probe tip reference point

and press MARK 1.

2. Move to the right (left) edge of the wafer and align with the same street or feature

and press MARK 2. The chuck theta will then rotate to correct the rotational error.

Increased magnification and careful alignment increases accuracy.

The same procedure can be used for theta alignment of the microscope and

probeheads. Although the chuck is physically rotated, the microscope and probeheads

are corrected with software. This allows the probehead rotational correction to track

the microscope, so aligning a microscope will automatically align the probeheads.

Packaged parts are easier to align to with the microscope rather than with the chuck.

GO HOME moves the selected stage to the X-Y home position as defined with Set

Home.

SET HOME defines the X-Y home position at the current position and zeros the X-Y

co-ordinates.

SET CONT defines the upper limit of chuck travel, set to provide adequate contact

without device or probe tip damaging excessive overtravel. When set, the function

becomes CL CONT to clear the contact position. The contact position must be set

each time the system is powered-up. The Z-Axis controls of Contact, Align and Separate

cannot be used until contact has been set. When choosing the microscope movement,

SET FOC is displayed – this saves the focus height. With CONTACT it is then moved

into its stored position.

Z UP moves the chosen stage upward at the selected speed.

Z DOWN moves the chosen stage downward at the selected speed.

REMOTE sets a flag to signal a tester the prober is ready, redefines the key as LOCAL

and disables all controls except this button. Pressing LOCAL resets the ready flag and

enables local controls.

THETA redefines the keys as CW, CENTER and CCW and controls the chuck theta in

clockwise, go to center and anticlockwise.

INDEX redefines the keys as X AXIS, Y AXIS and CANCEL. X and CANCEL Y indicate

the index value and may be changed using the joystick. After setting the index, press

the F1 and F2 keys to record. CANCEL exits the procedure.

IDX POS switches the display to show the current position in relation to the home

position in multiples of the set. F1 displays the X distance and F2, the Y value.

SUSS / PA300 / User Manual / M10-121841-00 / February 2002

REAL POS switches the display to the stage position in µm from the home position. F1

displays the X distance, F2 the Y value and F3, the Z position

QUIET switches on the quiet mode. Once the control position has been reached,

electricity is taken away from all motors to reduce electrical noise interference to the

device under test.

TURRET Changes microscope objective. Display changes to DEC INC and chooses

the next smaller / larger objective.

7.4 PA300 Mechanic Assembly

The PA300 Semiautomatic Prober has a fully motorized chuck stage consisting of x, y,

z and theta, and typically a motorized microscope movement of x and y axes. Additionally

the platen, microscope focus and nosepiece and up to four motorized probeheads

may be installed. A pin drive is integrated in the Z axis.

7.4.1 Microscope Movement

The microscope movement mounts the microscope to the prober and provides a means

of viewing beyond the field of view when the chuck cannot be moved because probes

are in contact. The microscope movement consists of x and y axis translation and a

microscope lift; the microscope typically has a manual focus or z axis and nosepiece

controls, which can also be motorized.

There are several microscope movements available:

• Motorized,

• Manual coaxial knob type,

• Adjustable.

Motorized

All microscope x and y axes control, as well as a motorized focus and nosepiece, is

performed from the PC-based User Interface or Joystick Controller.

Manual Coaxial

To change the position of the microscope use the knobs located on the right side of the

microscope movement. The Drag Lever sets the amount of resistance for precise feel.

Adjustable

The Adjustable Mount is a fixed microscope mount with an adjustable fixed position.

This allows the microscope to be coarsely positioned or centered over the probe tips.

7.4.2 Platen and Controls

The platen supports the probeheads and probecard. The typical configuration is for

vacuum base probeheads and a manual movement mount. Other configurations can

include magnetic, bolt-down and clamping probehead bases, as well as fixed mount.

The lid should only be opened for loading and unloading of wafers and substrates but

should be closed during operation.

SUSS / PA300 / User Manual / M10-121841-00 / February 2002

Manual Movement

The manual platen movement control knob is located at the left front corner of the

prober and provides a precise contact/separation stroke and a coarse set-up range.

contact

position

separate

position

raise lower

secured

adjust

lock

Separation/Contact Lever: the lever of the platen control knob provides 0.4

mm of travel to facilitate precise simultaneous

separation or contact of probe tips. A clockwise

rotation raises the platen for separation.

Platen Height Adjustment Knob: the large knurled knob provides up to 35 mm of

platen height adjustment to accommodate test

fixtures of various heights. This knob is locked in

place by the separation/contact lever. To adjust,

turn the lever a quarter of a turn anticlockwise;

the adjustment knob is now free to turn. A

clockwise movement raises the platen. Secure

by turning the lever clockwise.

Platen Lock: the small knurled knob locks the platen in the

current position. To lock, turn the lock knob inward.

Platen Travel Indicator: the dial indicator located on the rear left side of

the platen provides a means to determine the

amount of platen travel. A clockwise movement

indicates that the platen is rising.

Probehead Mounting Options

Vacuum: Vacuum relies on the system vacuum, also used to secure the

wafer to the chuck, to secure the probeheads. Vacuum is

distributed using six-port manifolds located on both sides of the

prober on the microscope bridge. Shutoffs for each probehead

are provided and when not in use should be closed to preserve

maximum system vacuum.

Bolt-down: Bolt-down is used in high frequency applications due to the

stability required for semi-rigid cables. Also probe-heavy

probeheads could unbalance, damaging the tips, if vacuum is

lost with vacuum secured probeheads.