SussPA300UserGuide - 第37页

36 SUSS / PA300 / User Manual / M10-121841-00 / February 2002 Manual Movement The manual platen movement control knob is located at the left front corner of the prober and provides a precise contact/separation stroke and…

SUSS / PA300 / User Manual / M10-121841-00 / February 2002

REAL POS switches the display to the stage position in µm from the home position. F1

displays the X distance, F2 the Y value and F3, the Z position

QUIET switches on the quiet mode. Once the control position has been reached,

electricity is taken away from all motors to reduce electrical noise interference to the

device under test.

TURRET Changes microscope objective. Display changes to DEC INC and chooses

the next smaller / larger objective.

7.4 PA300 Mechanic Assembly

The PA300 Semiautomatic Prober has a fully motorized chuck stage consisting of x, y,

z and theta, and typically a motorized microscope movement of x and y axes. Additionally

the platen, microscope focus and nosepiece and up to four motorized probeheads

may be installed. A pin drive is integrated in the Z axis.

7.4.1 Microscope Movement

The microscope movement mounts the microscope to the prober and provides a means

of viewing beyond the field of view when the chuck cannot be moved because probes

are in contact. The microscope movement consists of x and y axis translation and a

microscope lift; the microscope typically has a manual focus or z axis and nosepiece

controls, which can also be motorized.

There are several microscope movements available:

• Motorized,

• Manual coaxial knob type,

• Adjustable.

Motorized

All microscope x and y axes control, as well as a motorized focus and nosepiece, is

performed from the PC-based User Interface or Joystick Controller.

Manual Coaxial

To change the position of the microscope use the knobs located on the right side of the

microscope movement. The Drag Lever sets the amount of resistance for precise feel.

Adjustable

The Adjustable Mount is a fixed microscope mount with an adjustable fixed position.

This allows the microscope to be coarsely positioned or centered over the probe tips.

7.4.2 Platen and Controls

The platen supports the probeheads and probecard. The typical configuration is for

vacuum base probeheads and a manual movement mount. Other configurations can

include magnetic, bolt-down and clamping probehead bases, as well as fixed mount.

The lid should only be opened for loading and unloading of wafers and substrates but

should be closed during operation.

SUSS / PA300 / User Manual / M10-121841-00 / February 2002

Manual Movement

The manual platen movement control knob is located at the left front corner of the

prober and provides a precise contact/separation stroke and a coarse set-up range.

contact

position

separate

position

raise lower

secured

adjust

lock

Separation/Contact Lever: the lever of the platen control knob provides 0.4

mm of travel to facilitate precise simultaneous

separation or contact of probe tips. A clockwise

rotation raises the platen for separation.

Platen Height Adjustment Knob: the large knurled knob provides up to 35 mm of

platen height adjustment to accommodate test

fixtures of various heights. This knob is locked in

place by the separation/contact lever. To adjust,

turn the lever a quarter of a turn anticlockwise;

the adjustment knob is now free to turn. A

clockwise movement raises the platen. Secure

by turning the lever clockwise.

Platen Lock: the small knurled knob locks the platen in the

current position. To lock, turn the lock knob inward.

Platen Travel Indicator: the dial indicator located on the rear left side of

the platen provides a means to determine the

amount of platen travel. A clockwise movement

indicates that the platen is rising.

Probehead Mounting Options

Vacuum: Vacuum relies on the system vacuum, also used to secure the

wafer to the chuck, to secure the probeheads. Vacuum is

distributed using six-port manifolds located on both sides of the

prober on the microscope bridge. Shutoffs for each probehead

are provided and when not in use should be closed to preserve

maximum system vacuum.

Bolt-down: Bolt-down is used in high frequency applications due to the

stability required for semi-rigid cables. Also probe-heavy

probeheads could unbalance, damaging the tips, if vacuum is

lost with vacuum secured probeheads.

SUSS / PA300 / User Manual / M10-121841-00 / February 2002

Platen Cable Clamps

Cable clamps are provided to secure electrical connections and/or vacuum hoses.

Chuck Stage

All stage movements are DC servo motor driven with encoder positioning feedback.

Stage control is from the ProberBench User Interface or Joystick Controller. No manual

controls are required.

Vacuum Hold-down Adjustment

The vacuum chuck has provisions to adjust the vacuum hold-down for various size

wafers. To change the wafer size, unscrew and remove the current seal-pin. Insert

and screw in the appropriate length seal-pin. The unused seal-pins are usually stored

on the front left hand side of the system.

Chuck Grounding and Biasing

The chuck is isolated from ground and a lead is provided from the chuck to a banana

jack at the right rear corner of the prober mechanic. At this point the jack can be

connected to ground with the ground jack provided, or connected to a bias voltage

source.

Pin Drive

The pin drive is integrated into the Z-Axis and because the pins are fixed, one controls

them with the movement of the Z-Axis, an automatic interlock prevents damage

occurring to the wafer. If the wafer is lying on the chuck and held by vacuum, the

movement of the Z-Axis is restricted so that the pins stay in the chuck. After switching

off the vacuum, the chuck can be driven as far as the wafer unloading height and the

pins stand finally about 5-6mm away.