SussPA300UserGuide - 第43页
42 SUSS / PA300 / User Manual / M10-121841-00 / February 2002 9 Troubleshooting Each section starts with the problem or fault that is occurring. Work through the list of possible causes and solutions until the problem is…
SUSS / PA300 / User Manual / M10-121841-00 / February 2002
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8.5 Preventive Maintenance
The PA300 requires minimal preventive maintenance. In general, care should be taken
to keep the system clean and covered when not in use (e.g. overnight) and the following
periodic cleaning and lubrication procedures should be performed at the recommended
intervals.
Only a SUSS Field Service Representative or SUSS trained personnel should carry
out preventive maintenance.
8.5.1 Annual Operational Check
1. Remove, disassemble, and clean covers and adjust the planarity of the chuck and
the microscope.
2. Inspect all moving parts; clean and lubricate where necessary.
3. Check all basic adjustments including software compensation.
8.5.2 Lubrication
A list of parts which require lubrication and the recommended lubrication intervals
(assuming eight (8) hours per day operation) are shown below. The specified grease
is Kluber NBU 8 EP; the specified oil is a resin-free precision machine oil, such as
Custanol F. These products can also be purchased from Karl Suss.
Point of Lubrication Interval Lubricant
Microscope stage spindles 1 year grease
Microscope stage bearing rails 1 year grease
Chuck X-Y stage drive spindles 12 weeks grease
Chuck Z axis bearing rails 4 weeks oil
Please note that it is also possible to sign a separate contract with SUSS MicroTec for
these maintenance procedures. Please contact your SUSS Service Department for
further details. Contact information can be found at the front of this manual.
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SUSS / PA300 / User Manual / M10-121841-00 / February 2002
9 Troubleshooting
Each section starts with the problem or fault that is occurring. Work through the list of
possible causes and solutions until the problem is corrected. If the problem is not
resolved with this information contact SUSS Customer Service. In principle, Repairs
can only be carried out by SUSS Personnel. Contact details are in the front of this
manual or listed in the ProberBench User Interface under “Help and Contacting
Customer Service”.
9.1 System Does Not Power-Up
Check that:
1. Power, at the specified voltage and VA or watts, is supplied to the system.
2. Main Power Switch is on and the Indicator Lamp is lit.
3. On button has been pressed and its green lamp is illuminated.
4. Latching EMO Off button is in released position.
5. Electronics Rack main fuses are good. EMO power fuses are good (internal fuses)
9.2 Mechanics Do Not Respond to the Joystick Controller
Check that:
1. Mechanic responds to the User Interface.
2. The three LED function displays are on.
3. Controller is plugged into the Electronics Rack.
4. Loading lid is closed
9.3 Mechanics Do Not Respond to the User Interface (PC)
Check that:
1. Mechanic responds to the Joystick Controller.
2. User Interface is in demo mode.
3. Communications Error reported by a Dialog Box.
9.4 Stages Do Not Position Correctly
Check that:
1. Stage centers correctly.
2. Run Prober Initialization Program.
SUSS / PA300 / User Manual / M10-121841-00 / February 2002
43
10 Appendix
10.1 Equipment Data Base Units
Item
International
Units
American
Units
Formula
Physical Properties
Distance mm in. 1 mm = 0.03937 in.
Weight kg lb. (av) 1 kg = 2.2046 lb. (av)
Temperature °C °F (1.8 x °C) + 32 = °F
Heat watts Btu/Hr 1 W = 3.41221 Btu/Hr
Exhaust
Size mm in. 1 mm = 0.03937 in.
Pressure Pa in. of H
2
O 1 Pa = 0.0040146 in. of H
2
O
Flow m
3
/h CFM 1 m
3
/h = 0.5833 CFM
Fitting Size mm in. (nominal) 1 mm = 0.03937 in.
Liquid
Pressure kPa psig 1 kPa = 0.1450 psig
Temperature °C °F (1.8 x °C) + 32 = °F
Flow LPM GPM 1 LPM = 0.2641 GPM
Fitting Size mm (nominal) in. (nominal) 1 mm = 0.03937 in.
Vacuum
Size mm (nominal) in. (nominal) 1 mm = 0.03937 in.
Pressure Pa in. Hg 1 Pa = 0.0002952 in. Hg
Flow SLPM SCFM 1 SLPM = 0.035 SCFM
Fitting Size mm (nominal) in. (nominal) 1 mm = 0.03937 in.
Pressure mbar in. Hg 1 mbar = 0.000002952 in. Hg
Key:
Psig = pounds per square inch gauge SCFM = standard cubic feet per minute
LPM = liter per minute Btu/Hr = British thermal units/hour
GPM = gallons per minute lb = libra (pounds in weight)
SLPM = standard liter per minute av = avoirdupois