SussPA300UserGuide - 第46页
SUSS / PA300 / User Manual / M10-121841-00 / February 2002 45 Microscope Stage Manual X-Y Movement Range 50 mm Drive Type coaxial knobs Setup/Maintenance Lift manual, tilt-back Adjustable X-Y Movement Range 50 mm Drive T…
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SUSS / PA300 / User Manual / M10-121841-00 / February 2002
10.2 System Specifications
Chuck Stage
X-Y Movement Range 310 mm
Resolution 0.5 µm
Repeatability +/- 2 µm
Accuracy +/- 4 µm
Maximum Speed 50 mm/sec
Drive Type DC servo with linear encoder
Z-Axis Movement Range 15 mm
Resolution 0.25 µm
Repeatability +/- 1 µm
Drive Type DC servo with rotary encoder
Theta Movement Range +/- 6
°
Resolution 0.0001
°
Drive Type DC servo with rotary encoder
Chuck Planarity +/- 15 µm
Microscope Stage
Programmable
X-Y Movement Range 50 mm
Resolution 0.25 µm
Repeatability +/- 1 µm
Accuracy +/- 2.5 µm
Drive Type DC servo with rotary encoder
Z-Axis Focus Range 50 mm
Resolution 0.1 µm
Repeatability +/- 1 µm
Drive Type DC servo with rotary encoder
Setup/Maintenance Lift 80 mm pneumatic
Optional:
Z-Axis focus range 130 mm
Resolution 0.2 µm
Repeatability +/- 5 µm
Drive Type DC servo with rotary encoder
SUSS / PA300 / User Manual / M10-121841-00 / February 2002
45
Microscope Stage
Manual
X-Y Movement Range 50 mm
Drive Type coaxial knobs
Setup/Maintenance Lift manual, tilt-back
Adjustable
X-Y Movement Range 50 mm
Drive Type Clamping
Platen
Manual
Separation Stroke 400 µm
Coarse Adjustment Range 35 mm
Drive Type Compound knob
Fixed Probehead Mounting Vacuum, magnetic and high frequency bolt-
down and kinematic clamping.
Probecard Mounting Accepts standard SUSS probecard holder
for 4.5“ and 6“ probecards.
Lubrication
Microscope stage spindles Grease once every year
Microscope stage bearing rails Grease once every year
Chuck X-Y stage drive spindles Grease once every 12 weeks
Chuck Z-axis spindle Oil once every 12 weeks
Chuck Z-axis bearing rails Oil once every 1 year
Software
PC Minimum Requirement Please contact SUSS for more information
Operating System Windows NT4.0 & 2000 Professional
Control Software SUSS ProberBench
®
5
Interfaces
RS232 Electronics Standard
IEEE488 Electronics Optional
IEEE488 PC Optional
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SUSS / PA300 / User Manual / M10-121841-00 / February 2002
Utilities
Vacuum Less than 200 mbar absolute , flow rate
insignificant.
Compressed Air 0.4 MPa to 1 MPa or 4 bar to 10 bar, flow
rate insignificant.
Vacuum/Air Inputs US: 1/4“, all other: 6 mm.
Ergonomic Information
Probe station Horizontal usage position
Electronics ProberBench Horizontal usage position
Dimensions (W x D x H)
Mechanic (Table device): H = min. 950 mm x 900 mm x 770 mm with
microscope in raised position. Cameras or
laser cutters will require additional
clearance.
Mechanic (Standard device):
H = min. 950 mm x 900 mm x 1430 mm (see above)
Electronics 520 mm x 600 mm x 160 mm
with connectors installed.
Joystick Controller 260 mm x 260 mm x 120 mm
with connector installed.
Packaging
System box Length: 1230 mm
Width: 1200 mm
Height: 1120 mm
Net weight: 498 kg
Gross weight: 607 kg
System table with palette Length: 1050 mm
Width: 1000 mm
Height: 850 mm
Net Weight: 97 kg
Gross weight: 102 kg
Accessories Length: 800 mm
Width: 1200 mm
Height: 800 mm
Gross weight: approx. 80 kg