SussPA300UserGuide - 第5页
4 SUSS / PA300 / User Manual / M10-121841-00 / February 2002 Manufacturer Information System: Semi-Automatic Probe System PA300 Manufacture Date: This manual has been written for systems that were built from 2001. Versio…
SUSS / PA300 / User Manual / M10-121841-00 / February 2002
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7.4 PA300 Mechanic Assembly 35
7.4.1 Microscope Movement 35
7.4.2 Platen and Controls 35
8 USER MAINTENANCE 38
8.1 General Maintenance 38
8.2 Visual Checks 38
8.3 Safety Interlock Switch 38
8.4 Mechanical Adjustments 38
8.4.1 Chuck Planarizing Procedure 38
8.4.2 Platen Levelling Procedure 39
8.4.3 Chuck Stage Z Axis End Limit Sensor Adjustment 40
8.4.4 Microscope Stage Pneumatic Up/Down Adjustment 40
8.5 Preventive Maintenance 41
8.5.1 Annual Operational Check 41
8.5.2 Lubrication 41
9 TROUBLESHOOTING 42
9.1 System Does Not Power-Up 42
9.2 Mechanics Do Not Respond to the Joystick Controller 42
9.3 Mechanics Do Not Respond to the User Interface (PC) 42
9.4 Stages Do Not Position Correctly 42
10 APPENDIX 43
10.1 Equipment Data Base Units 43
10.2 System Specifications 44
10.3 Ergonomic Information Table 49
10.4 Installation Checklist 56
11 HEALTH HAZARD ANALYSIS 57
11.1 Process Health Hazard Analysis 57
11.1.1 Use of Instruments 57
11.1.2 Safety Conception 57
11.2 Electronics 58
11.2.1 Basic Design 58
11.2.2 Guidelines for Electronics in the User Information 58
11.3 Radiation 58
11.4 Earthquake Safety 58
11.5 Total Risk Evaluation 58
12 WARRANTY AND LIMITATIONS 59
12.1 Scope 59
12.2 Who is Protected 59
12.3 How to Receive a Warranty Service 60
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SUSS / PA300 / User Manual / M10-121841-00 / February 2002
Manufacturer Information
System: Semi-Automatic Probe System PA300
Manufacture Date: This manual has been written for systems
that were built from 2001.
Version: Kernel V 3.4
Manufacturer:
SUSS Microtec Test Systems GmbH
Süss - Strasse 1
D-01561 SACKA
Germany
Tel: [+49] (0) 35240 - 73 - 0
Fax: [+49] (0) 35240 - 73 - 700
Email: prober@suss.de
For maintenance and repair contact our service department:
Europe:
Tel: [+49] (0) 35240 - 73 - 220/- 221
Fax: [+49] (0) 35240 - 73 - 722
Email: service@sussdd.de
France: Switzerland:
Tel: [+33] 450 - 35 - 8392 Tel: [+41] 56 - 4832 - 525
Fax: [+33] 450 - 35 - 8801 Fax: [+41] 56 - 4832 - 520
Japan: Asia:
Tel: [+81] 45 - 931 - 5600 Tel: [+66] 2 - 938 - 44 - 26/- 27
Fax: [+81] 45 - 931 - 5601 Fax: [+66] 2 - 512 - 5569
USA:
Tel: [+001] 802 - 244 - 5181
Fax: [+001] 802 - 244 - 5103
SUSS / PA300 / User Manual / M10-121841-00 / February 2002
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Safety Instructions and Symbols
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Achtung, bewegte Teile! Verletzungsgefahr! Im eingeschalteten Zustand nicht
hineingreifen!
Attention, moving parts! Danger of injury! Do not touch the machine when
switched on!
Attention, pièces en mouvement! Risque de blessures! Ne pas toucher pendant
le fonctionnement de la machine!
Attenzione, parti in movimento! Pericolo, non toccare se la maccina è in
funzione!
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Achtung, heiße Flächen! Verbrennungsgefahr! Im aktiven Zustand nicht
berühren!
Attention, hot surfaces! Danger of burning! Do not touch when active!
Attention, zones chaudes! Risque de brulures! Ne pas toucher si actif!
Attenzione superficie calda! Rischio di ustioni, non toccare una volta attivo!
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Achtung, kalte Flächen! Erfrierungsgefahr! Im aktiven Zustand nicht berühren!
Attention, cold surfaces! Danger of freezing! Do not touch when active!
Attention, zones froides! Risque de brulures! Ne pas toucher si actif!
Attenzione superficie fredda! Rischio di congelamento, non toccare una volta
attivo!
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Achtung, Laserstrahlen! Ohne Augenschutz Verletzungsgefahr!
Attention, laser beams! Danger of getting hurt without eye protection!
Attention rayonnement Laser! Risque de cécité en l’absence de lunettes de
securité!
Attenzionne raggio laser! Pericolo ustioni, non tocarre se la macchina è in
fuzione!
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Achtung, spannungsführende Teile! Gefahr des elektrischen Schlages! Im
eingeschalteten Zustand nicht berühren!
Attention, high voltage! Danger of electrical shock! Do not touch during
operation!
Attention, haute tension! Risque d’électrocution! Ne pas toucher pendant le
fonctionnement de la machine!
Attenzione alta tensione! Pericolo, non toccare se la macchina è in fuzione!
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Achtung, allgemeiner Gefahrenhinweis! Informationen im Handbuch beachten!
Attention, general hazard! Pay attention to the information given in the
manuals!
Attention, danger! Consulter les informations fournies dans les notices de la
machine!
Attenzione pericolo! Leggere attentamente il manuale!