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56 SUSS / PA300 / User Manual / M10-121841-00 / February 2002 10.4 Installation Checklist This is the Installation Checklist for the SUSS PA300 Semiautomatic Prober. Review and complete the check points to ensure proper …

SUSS / PA300 / User Manual / M10-121841-00 / February 2002

Indicator Part

SESC

Criteria

Actual Value Notes

Height of microscope

eyepieces. Must be

adjustable.

max. 1730 mm

min. 1270 mm

1430 mm Yes

Foot clearance:

Height:

Depth:

Width:

min. 150 mm

min. 490 mm

in front:

550 mm

270 mm

790 mm

Yes

Sitting work place

computer: sitting

work place

table to be

supplied by

customer

Height of keyboard,

trackball or mouse

max. 760 mm

min. 710 mm

location to be

determined by

customer

see

section

2.9.1

Vertical leg clearance min. 623 mm

location to be

determined by

customer

see

section

2.9.1

Horizontal leg

clearance, depth at

knee level

min. 508 mm

location to be

decided by

customer

see

section

2.9.1

Horizontal leg

clearance, depth at foot

level

min. 660 mm

(254 mm for

vertical foot

clearance)

location to be

detremined by

customer

see

section

2.9.1

Horizontal leg

clearance, width

min. 610 mm

location to be

determined by

customer

see

section

2.9.1

Height of microscope

eyepiece. Must be

adjustable

max. 1370 mm

min. 1220 mm

N/A

Thickness of work

surface

max. 51 mm

location to be

determined by

customer

see

section

2.9.1

Work surface edge

radius where the

operator can assume a

static posture in contact

with the edge

radius min. 6.4

location to be

determined by

customer

see

section

2.9.1

SUSS / PA300 / User Manual / M10-121841-00 / February 2002

10.4 Installation Checklist

This is the Installation Checklist for the SUSS PA300 Semiautomatic Prober. Review

and complete the check points to ensure proper installation and operation.

All transport locks have been removed, including microscope

movement, platen and chuck stage

All components and accessories have been installed

All electrical interconnects are made and secured

Non-electrical utilities are connected, including vacuum and air

All components requiring AC power are plugged into outlets with

the required voltage and VA or wattage

Apply power and ensure the EMO system operates (including the

loading lid interlock)

Check functionality of all components

Check operation of chuck stage, microscope movement and

platen, ensuring free and smooth movement throughout their

entire range of travel

Check (and adjust if required) the planarity of the chuck stage

and microscope movement

Ensure all safety covers, panels and enclosures are installed or

secured

Ensure that the customer is trained in the proper operation of the

system

SUSS / PA300 / User Manual / M10-121841-00 / February 2002

11 Health Hazard Analysis

11.1 Process Health Hazard Analysis

11.1.1 Use of Instruments

The semi-automatic prober PA300 is designed as a lab instrument according to DIN

EN 61 010 T1: 1994-03.

It is intended for use on industrial processes and laboratory applications.

As an electro-mechanical tool together with measurement instruments, it is used for

testing and probing wafers.

It’s specific task is the postitioning of probe needles in contact with semiconductor

structures.

It is assumed that the operator and service personnel are properly trained and that

they are periodically retrained for unexpected hazards.

As a lab instrument the PA300 prober should provide for universal set up and

applications.

11.1.2 Safety Conception

Mechanics

1. Normal Operation

After opening the loading lid during normal operation, the x-y stage will come to

a standstill in order to avoid the risk of injury to the operator. The control panel

should be kept separate to the PA300 operating area. There should be no

other potential risks during this type of operation.

During the application operation, handling creates no further hazards. Openings

to moving parts can only be reached via the loading lid with interlock.

Moving parts are potentially hazardous to the operator but can only be touched

when not in application operation. It should be noted that materials outside the

device can also be effected e.g. when unloading and positioning the wafer.

Unintentional touching has been reduced to a minimum but conscious access

to the chuck and the probecard area have been left.

2. Alignment Area

Parts which move quickly and with force towards a mechanical stop are protected

by screw on covers (e.g. x-y stage). The motorized microscope and probe

head motions are slow. They sit outside the operating area and do not run to a

stop. Openings caused by unused parts (e.g. the probecard) stay open as

during normal operation access is not needed.

3. Further Risks

Further risks for untrained personnel are relatively low.

The emergency OFF function is set according to Stop-Category 0: a complete

standstill is carried out through the immediate shutting off of the energy sources.

The emergency OFF function should always be used in the case of an

emergency. It can also be set to protect the measuring device against

programming errors. Control errors may affect the mechanics but the OFF

function prevents damage to the system and to the test objects by effecting an

immediate standstill.