00197498-03_UM_SiplaceCA-Serie_EN - 第215页
User Manual SIPLACE CA-Series 4 SIPLACE Wafer System (SWS) From software version SC.708.0 Edition 12/20 14 4.2 Overview of the Modules 215 4 Fig. 4.2 - 3 Overview of the modules for the SWS (1) Clamping unit (2) Wafer ca…
4 SIPLACE Wafer System (SWS) User Manual SIPLACE CA-Series
4.2 Overview of the Modules From software version SC.708.0 Edition 12/2014
214
4
Fig. 4.2 - 2 Supply unit for the SWS, front view
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(1) Electronic unit front (2) Computer unit
(3) Transformer (4) Pressure switch
(5) Mains filter (6) Solenoid valve
(7) Cover
3
2
1
7
6
5
4
User Manual SIPLACE CA-Series 4 SIPLACE Wafer System (SWS)
From software version SC.708.0 Edition 12/2014 4.2 Overview of the Modules
215
4
Fig. 4.2 - 3 Overview of the modules for the SWS
(1) Clamping unit (2) Wafer camera
(3) Flip Unit (4) Wafer support
(5) Guidance
4
3
1
2
5
4 SIPLACE Wafer System (SWS) User Manual SIPLACE CA-Series
4.3 Description of the SWS Modules From software version SC.708.0 Edition 12/2014
216
4.3 Description of the SWS Modules
4.3.1 Supply Unit
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Fig. 4.3 - 1 Supply unit
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(1) Manometer for compressed air supply (2) Voltage supply
(3) Communication with SIPLACE machine (4) CAN bus
(5) Compressed air connection (modified
adapter dummy connector [03011592-01])
(6) LAN1
(7) LAN2
2
1
3
4
5
6
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