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User Manual SIPLACE CA-Series 4 SIPLACE Wafer System (SWS) From software version SC.708.0 Edition 12/2014 4.3 Description of the SWS Modules 227 4 Fig. 4.3 - 10 Wafer changer system (1) Wafer changer with gripper (2) Mag…
4 SIPLACE Wafer System (SWS) User Manual SIPLACE CA-Series
4.3 Description of the SWS Modules From software version SC.708.0 Edition 12/2014
226
4
4.3.7 Wafer Changer System
The wafer changer system consists of the magazine lift and the wafer changer with gripper.
The wafer changer system is needed to ensure a fully automatic production with the SWS. The
operator is only needed for refilling the magazine lift with new wafer cassettes.
The wafers are provided in a wafer magazine. The wafer magazine is placed by the user into the
wafer magazine lift. The magazine lift lifts the wafer magazine into the appropriate height so that
the corresponding wafer is in handover position. In this position the wafer changer can take the
wafer out of the magazine and push it back in after the wafer has been processed.
The wafer changer consists primarily of the gripper unit and the guidance rails. The gripper unit
takes up the wafer and moves it to the position currently required.
PLEASE NOTE
No automatic ejector tool changeover
In this first version there is no automatic ejection tool changer available.
The SWS can therefore only continuously process dies which can be released using the
same ejector tool.
User Manual SIPLACE CA-Series 4 SIPLACE Wafer System (SWS)
From software version SC.708.0 Edition 12/2014 4.3 Description of the SWS Modules
227
4
Fig. 4.3 - 10 Wafer changer system
(1) Wafer changer with gripper
(2) Magazine lift
1
2
4 SIPLACE Wafer System (SWS) User Manual SIPLACE CA-Series
4.3 Description of the SWS Modules From software version SC.708.0 Edition 12/2014
228
4.3.7.1 Magazine lift
4
Fig. 4.3 - 11 Magazine lift
(1) Magazine unit with exchangeable plate for holding 8" and 12 " magazine cassettes
(2) Motor
(3) Wafer changer with cover
4
2
3
1