00197498-03_UM_SiplaceCA-Serie_EN - 第228页
4 SIPLACE Wafer System (SWS) User Manual SIPLACE CA- Series 4.3 Description of the SWS Modules From software version SC.708.0 Edition 12/2014 228 4.3.7.1 Magazine lif t 4 Fig. 4.3 - 1 1 Magazine lift (1) Magazine unit wi…
User Manual SIPLACE CA-Series 4 SIPLACE Wafer System (SWS)
From software version SC.708.0 Edition 12/2014 4.3 Description of the SWS Modules
227
4
Fig. 4.3 - 10 Wafer changer system
(1) Wafer changer with gripper
(2) Magazine lift
1
2
4 SIPLACE Wafer System (SWS) User Manual SIPLACE CA-Series
4.3 Description of the SWS Modules From software version SC.708.0 Edition 12/2014
228
4.3.7.1 Magazine lift
4
Fig. 4.3 - 11 Magazine lift
(1) Magazine unit with exchangeable plate for holding 8" and 12 " magazine cassettes
(2) Motor
(3) Wafer changer with cover
4
2
3
1
User Manual SIPLACE CA-Series 4 SIPLACE Wafer System (SWS)
From software version SC.708.0 Edition 12/2014 4.3 Description of the SWS Modules
229
4.3.7.2 Wafer changer
According to the location (2 and 4 or 1 and 3) there are two different versions of the wafer changer.
4
Fig. 4.3 - 12 Main gripper modules (location 2,4)
4
(1) Gripper (2) Toothed belt axis
(3) Installation location for barcode scanner
(optional)
(4) AD-MOT board below the cover
(5) Motor with coupling
1
4
5
3
2