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User Manual SIPLACE CA-Series 4 SIPLACE Wafer System (SWS) From software version SC.708.0 Edition 12/20 14 4.5 SIPLACE SWS Wafer Stretcher 243 4.5.7 Converting the wafer support In order to use various wafer sizes (8&quo…
4 SIPLACE Wafer System (SWS) User Manual SIPLACE CA-Series
4.5 SIPLACE SWS Wafer Stretcher From software version SC.708.0 Edition 12/2014
242
4.5.6.2 Settings
Fig. 4.5 - 5 Wafer support - setting the frame width
Remove the screws at the four points (1) and fit these in the required position (FF105 or FF
108).
Remove the screw at the relevant point (2) and fit it in the required position (FF105 or FF 108).
Loosen the screw at the relevant point (3) and fit it in the required position (FF105 or FF 108).
Remove the screw at the relevant point (4) and fit it in the required position (FF105 or FF 108).
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User Manual SIPLACE CA-Series 4 SIPLACE Wafer System (SWS)
From software version SC.708.0 Edition 12/2014 4.5 SIPLACE SWS Wafer Stretcher
243
4.5.7 Converting the wafer support
In order to use various wafer sizes (8" and 12") with the SIPLACE SWS Wafer Stretcher, you need
to convert the SIPLACE SWS Wafer Stretcher.
You can order the SIPLACE SWS Wafer Stretcher as follows:
– 00519717-xx 12 inch Wafer Expander
and as an option 4
– 03079734-xx 8 inch Retrofit Kit
or
– 00519719-xx 8 inch Wafer Expander
and as an option 4
– 00519720-xx 12 inch Retrofit Kit
The following instructions describe the changeover from an 8" to a 12" wafer support (see also
“Differences in conversion from 12" to 8” on page 256).
4 SIPLACE Wafer System (SWS) User Manual SIPLACE CA-Series
4.5 SIPLACE SWS Wafer Stretcher From software version SC.708.0 Edition 12/2014
244
4.5.7.1 Parts in the 12" wafer expander retrofit kit
Fig. 4.5 - 6 Parts in the 12" wafer support retrofit kit
(1) Assembly bracket for sensor 1 (including 2 x M3x6 screws)
(2) Assembly bracket for sensor 2 (including 2 x M3x6 screws)
(3) Block with fastening screws for clamp
(4) Auxiliary tool for fixing the lifting piston, [item no. 03121551-xx] is supplied and will in future
be included in the SWS service box.
(5) Stroke ring
(6) Downholder plate right and left
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