00197498-03_UM_SiplaceCA-Serie_EN - 第244页
4 SIPLACE Wafer System (SWS) User Manual SIPLACE CA- Series 4.5 SIPLACE SWS Wafer Stretcher From software version SC.708.0 Edition 12/2014 244 4.5.7.1 Part s in the 12" wafer exp ander retrofit kit Fig. 4.5 - 6 Part…
User Manual SIPLACE CA-Series 4 SIPLACE Wafer System (SWS)
From software version SC.708.0 Edition 12/2014 4.5 SIPLACE SWS Wafer Stretcher
243
4.5.7 Converting the wafer support
In order to use various wafer sizes (8" and 12") with the SIPLACE SWS Wafer Stretcher, you need
to convert the SIPLACE SWS Wafer Stretcher.
You can order the SIPLACE SWS Wafer Stretcher as follows:
– 00519717-xx 12 inch Wafer Expander
and as an option 4
– 03079734-xx 8 inch Retrofit Kit
or
– 00519719-xx 8 inch Wafer Expander
and as an option 4
– 00519720-xx 12 inch Retrofit Kit
The following instructions describe the changeover from an 8" to a 12" wafer support (see also
“Differences in conversion from 12" to 8” on page 256).
4 SIPLACE Wafer System (SWS) User Manual SIPLACE CA-Series
4.5 SIPLACE SWS Wafer Stretcher From software version SC.708.0 Edition 12/2014
244
4.5.7.1 Parts in the 12" wafer expander retrofit kit
Fig. 4.5 - 6 Parts in the 12" wafer support retrofit kit
(1) Assembly bracket for sensor 1 (including 2 x M3x6 screws)
(2) Assembly bracket for sensor 2 (including 2 x M3x6 screws)
(3) Block with fastening screws for clamp
(4) Auxiliary tool for fixing the lifting piston, [item no. 03121551-xx] is supplied and will in future
be included in the SWS service box.
(5) Stroke ring
(6) Downholder plate right and left
1
5
6
2
4
3
User Manual SIPLACE CA-Series 4 SIPLACE Wafer System (SWS)
From software version SC.708.0 Edition 12/2014 4.5 SIPLACE SWS Wafer Stretcher
245
4.5.7.2 Preparations
Close all current processes on the SWS module.
Move the wafer table into the changeover position.
In the view, select Manual operations -> Wafer handling systems -> Go to change
position.
Open the clamp.
In the view, select Manual operations -> Wafer handling systems ->Open wafer
clamp.
– The clamp will open and the expansion ring will move downwards.
Open the expander
In the view, select Manual operations -> Wafer handling systems ->Release
stretcher.
– The downholder plate will move upwards.
In the view, select Production -> Other and click on the red "off" button there.
SWS GUI and Linux are shut down properly. 4
Switch off the SWS at the main switch.
CAUTION
Avoid damage to the gripper
The gripper could be damaged while you are working on the wafer support.
Push the gripper in the direction of the wafer lift and out of the wafer support working
area.