00197498-03_UM_SiplaceCA-Serie_EN - 第246页
4 SIPLACE Wafer System (SWS) User Manual SIPLACE CA- Series 4.5 SIPLACE SWS Wafer Stretcher From software version SC.708.0 Edition 12/2014 246 4.5.7.3 Removing the 8" wafer support Removing the downholder plate 4 Y …
User Manual SIPLACE CA-Series 4 SIPLACE Wafer System (SWS)
From software version SC.708.0 Edition 12/2014 4.5 SIPLACE SWS Wafer Stretcher
245
4.5.7.2 Preparations
Close all current processes on the SWS module.
Move the wafer table into the changeover position.
In the view, select Manual operations -> Wafer handling systems -> Go to change
position.
Open the clamp.
In the view, select Manual operations -> Wafer handling systems ->Open wafer
clamp.
– The clamp will open and the expansion ring will move downwards.
Open the expander
In the view, select Manual operations -> Wafer handling systems ->Release
stretcher.
– The downholder plate will move upwards.
In the view, select Production -> Other and click on the red "off" button there.
SWS GUI and Linux are shut down properly. 4
Switch off the SWS at the main switch.
CAUTION
Avoid damage to the gripper
The gripper could be damaged while you are working on the wafer support.
Push the gripper in the direction of the wafer lift and out of the wafer support working
area.
4 SIPLACE Wafer System (SWS) User Manual SIPLACE CA-Series
4.5 SIPLACE SWS Wafer Stretcher From software version SC.708.0 Edition 12/2014
246
4.5.7.3 Removing the 8" wafer support
Removing the downholder plate 4
You need to replace the downholder plate for the relevant wafer support.
Fig. 4.5 - 7 Wafer support - removing the downholder plate
Insert the auxiliary tool for fixing the lifting piston (2) into the opening and fix the piston inside.
One after the other, loosen all 4 screws (1) on the two downholder plates (5).
Remove the conical fixing disc (3). Make sure that you keep these safe for installation later
on.
Remove the two downholder plates (4).
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User Manual SIPLACE CA-Series 4 SIPLACE Wafer System (SWS)
From software version SC.708.0 Edition 12/2014 4.5 SIPLACE SWS Wafer Stretcher
247
Loosening the clamp 4
Fig. 4.5 - 8 Wafer support - loosening the clamp
Remove the circlip on the shaft (2) of the clamp (1).
Unhook the clamp so that the clamping lever (3) is free (4).
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