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User Manual SIPLACE CA-Series 4 SIPLACE Wafer System (SWS) From software version SC.708.0 Edition 12/20 14 4.5 SIPLACE SWS Wafer Stretcher 247 Loosening the clamp 4 Fig. 4.5 - 8 Wafer support - loosening the clamp  Remo…

4 SIPLACE Wafer System (SWS) User Manual SIPLACE CA-Series

4.5 SIPLACE SWS Wafer Stretcher From software version SC.708.0 Edition 12/2014

246

4.5.7.3 Removing the 8" wafer support

Removing the downholder plate 4

You need to replace the downholder plate for the relevant wafer support.

Fig. 4.5 - 7 Wafer support - removing the downholder plate

 Insert the auxiliary tool for fixing the lifting piston (2) into the opening and fix the piston inside.

 One after the other, loosen all 4 screws (1) on the two downholder plates (5).

 Remove the conical fixing disc (3). Make sure that you keep these safe for installation later

on.

 Remove the two downholder plates (4).

User Manual SIPLACE CA-Series 4 SIPLACE Wafer System (SWS)

From software version SC.708.0 Edition 12/2014 4.5 SIPLACE SWS Wafer Stretcher

247

Loosening the clamp 4

Fig. 4.5 - 8 Wafer support - loosening the clamp

 Remove the circlip on the shaft (2) of the clamp (1).

 Unhook the clamp so that the clamping lever (3) is free (4).

4 SIPLACE Wafer System (SWS) User Manual SIPLACE CA-Series

4.5 SIPLACE SWS Wafer Stretcher From software version SC.708.0 Edition 12/2014

248

Removing the stroke ring 4

You need to replace the stroke ring for the relevant wafer support.

Fig. 4.5 - 9 Wafer support - removing the stroke ring

 Loosen the 4 screws (1) fixing the stroke ring.

 Remove th fixing disc (2) and the spring (3). Make sure that the fixing disc (2) and the spring

(3) are kept safe for refitting later on.

 Unplug the two sensors (4) from the connector (5) of the cable extension (6).

 Remove the stroke ring.