00197498-03_UM_SiplaceCA-Serie_EN - 第250页
4 SIPLACE Wafer System (SWS) User Manual SIPLACE CA- Series 4.5 SIPLACE SWS Wafer Stretcher From software version SC.708.0 Edition 12/2014 250 Fitting the sensors on the assembly brackets for the 12" 4 4 Fig. 4.5 - …
User Manual SIPLACE CA-Series 4 SIPLACE Wafer System (SWS)
From software version SC.708.0 Edition 12/2014 4.5 SIPLACE SWS Wafer Stretcher
249
Dismantling the sensors for the 8" stroke ring 4
The two sensors are fixed to the stroke ring in the 8" wafer support. These sensors need to be
dismantled for later refitting of the 8" stroke ring. In the case of the 12" wafer support, both sensors
are fitted to the wafer support in the SWS, using the brackets supplied.
4
Fig. 4.5 - 10 Wafer support - 8" stroke ring removed
Dismantle the heat protection plates fitted over the sensors.
Dismantle the two sensors (1) from the assembly brackets of the stroke ring.
Remove the two sensors and fit these on the two assembly brackets from the 12" retrofit kit.
1
1
1
4 SIPLACE Wafer System (SWS) User Manual SIPLACE CA-Series
4.5 SIPLACE SWS Wafer Stretcher From software version SC.708.0 Edition 12/2014
250
Fitting the sensors on the assembly brackets for the 12" 4
4
Fig. 4.5 - 11 Wafer support - sensor 1
(1) Assembly bracket
(2) Sensor fitted to assembly bracket
4
Fig. 4.5 - 12 Wafer support - sensor 2
(1) Assembly bracket
(2) Sensor fitted to assembly bracket
Fit the two sensors (2) to the assembly bracket (1) from the 12" retrofit kit.
1
2
1
2
User Manual SIPLACE CA-Series 4 SIPLACE Wafer System (SWS)
From software version SC.708.0 Edition 12/2014 4.5 SIPLACE SWS Wafer Stretcher
251
Fitting the sensors in the 12" wafer support 4
Fit the two sensors with the assembly brackets into the wafer support.
4
Fig. 4.5 - 13 Wafer support - fitting the sensors
Reconnect the sensor connections.
Fit the two sensors with the assembly brackets into the wafer support.
1
2