00197498-03_UM_SiplaceCA-Serie_EN - 第252页
4 SIPLACE Wafer System (SWS) User Manual SIPLACE CA- Series 4.5 SIPLACE SWS Wafer Stretcher From software version SC.708.0 Edition 12/2014 252 Fitting the block to the clamp 4 4 Fig. 4.5 - 14 Wafer support - fitting the …
User Manual SIPLACE CA-Series 4 SIPLACE Wafer System (SWS)
From software version SC.708.0 Edition 12/2014 4.5 SIPLACE SWS Wafer Stretcher
251
Fitting the sensors in the 12" wafer support 4
Fit the two sensors with the assembly brackets into the wafer support.
4
Fig. 4.5 - 13 Wafer support - fitting the sensors
Reconnect the sensor connections.
Fit the two sensors with the assembly brackets into the wafer support.
1
2
4 SIPLACE Wafer System (SWS) User Manual SIPLACE CA-Series
4.5 SIPLACE SWS Wafer Stretcher From software version SC.708.0 Edition 12/2014
252
Fitting the block to the clamp 4
4
Fig. 4.5 - 14 Wafer support - fitting the block for the clamp
Fit the block (2) from the 12" retrofit kit onto the clamp (1).
1
2
User Manual SIPLACE CA-Series 4 SIPLACE Wafer System (SWS)
From software version SC.708.0 Edition 12/2014 4.5 SIPLACE SWS Wafer Stretcher
253
Fitting the cover plate (for 12" wafer support only) 4
Fit the cover plate onto the wafer support, using the 4 screws.
4
Fig. 4.5 - 15 Wafer support - fitting the cover plate
1