00197498-03_UM_SiplaceCA-Serie_EN - 第253页
User Manual SIPLACE CA-Series 4 SIPLACE Wafer System (SWS) From software version SC.708.0 Edition 12/20 14 4.5 SIPLACE SWS Wafer Stretcher 253 Fitting the cover plate (for 12" wafer supp ort only) 4 Fit the cover pl…
4 SIPLACE Wafer System (SWS) User Manual SIPLACE CA-Series
4.5 SIPLACE SWS Wafer Stretcher From software version SC.708.0 Edition 12/2014
252
Fitting the block to the clamp 4
4
Fig. 4.5 - 14 Wafer support - fitting the block for the clamp
Fit the block (2) from the 12" retrofit kit onto the clamp (1).
1
2
User Manual SIPLACE CA-Series 4 SIPLACE Wafer System (SWS)
From software version SC.708.0 Edition 12/2014 4.5 SIPLACE SWS Wafer Stretcher
253
Fitting the cover plate (for 12" wafer support only) 4
Fit the cover plate onto the wafer support, using the 4 screws.
4
Fig. 4.5 - 15 Wafer support - fitting the cover plate
1
4 SIPLACE Wafer System (SWS) User Manual SIPLACE CA-Series
4.5 SIPLACE SWS Wafer Stretcher From software version SC.708.0 Edition 12/2014
254
Fitting the stroke ring 4
4
Fig. 4.5 - 16 Wafer support - fitting the stroke ring
Insert the stroke ring (1).
Insert the four springs (3) into the four holes.
Fit the four fixing discs (2) into place.
Fasten the fixing discs into place with the fastening screws (4).
2
3
3
1