00197498-03_UM_SiplaceCA-Serie_EN - 第256页
4 SIPLACE Wafer System (SWS) User Manual SIPLACE CA- Series 4.5 SIPLACE SWS Wafer Stretcher From software version SC.708.0 Edition 12/2014 256 4.5.7.4 Differences in conversion from 12 " to 8 The sensors nee d to be…
User Manual SIPLACE CA-Series 4 SIPLACE Wafer System (SWS)
From software version SC.708.0 Edition 12/2014 4.5 SIPLACE SWS Wafer Stretcher
255
Fitting the downholder plates 4
Fig. 4.5 - 17 Wafer support - removing the downholder plate
Align the lifting piston with the auxiliary tool (2) so that the opening points outwards.
Place the downholder plates from the 12" retrofit kit onto the wafer support.
Insert the conical fixing discs (3) into the hole.
Loosely tighten the downholder plates with the screws.
Insert the auxiliary tool (4) into the opening and fix into place with the lifting piston inside.
Tighten all 4 screws (1) on the two downholder plates (5).
1
1
1
1
1
1
1
1
2
3
4
4
4
4 SIPLACE Wafer System (SWS) User Manual SIPLACE CA-Series
4.5 SIPLACE SWS Wafer Stretcher From software version SC.708.0 Edition 12/2014
256
4.5.7.4 Differences in conversion from 12" to 8
The sensors need to be dismantled from the wafer support and fitted onto the 8" expansion plates.
See See "Wafer support - 8" stroke ring removed" on page 249.
The block needs to be dismantled form the clamp and used in place of the clamping level. See
See "Wafer support - loosening the clamp" on page 247.
User Manual SIPLACE CA-Series 5 Setting up and Commissioning
From software version SC.708.0 Edition 12/2014 EN -DRAFT 5.1 Dimensions and Weight
257
5 Setting up and Commissioning
5.1 Dimensions and Weight
For details of the dimensions and weight of the placement machine, refer to section 3.4, page 128.
5.2 Delivery Configuration and Transportation of
Placement Machine
5.2.1 Shipping Packaging
Within Europe the placement machine is transported on a wooden pallet and is wrapped in plastic
foil. Outside Europe, the machine is supplied in a wooden crate mounted on a stable wooden pal-
let.
5.2.1.1 Dimensions of Transportation Packaging
The dimension of the wooden transport crate are as follows:
Length 2404 mm
Width 2790 mm
Height 1600 mm 5
5
Fig. 5.2 - 1 Transport crate - dimensions in millimeters
(A) Fork-lift attachment points