00197973-10_SM_MaterialTower - 第5页

0019797 3 - 10 / 02 , 2016 Contents SIPLACE Mat. Towe r St ora ge Serv ice Manual © ASM v 6.2 Z B elt ........................................................... ..........................................................…

100%1 / 274
Contents 00197973-10 / 02 , 2016
iv © ASM SIPLACE Mat. Tower Storage Service Manual
3.1.4 Exchange steps ................................................................................................................................................................ 3-2
4 X Axis 4-1
4.1 X Motor ............................................................................................................................................................................... 4-3
4.1.1 Introduction ...................................................................................................................................................................... 4-3
4.1.2 Tools, Material and Scheduling .................................................................................................................................. 4-3
4.1.3 Prerequisites ..................................................................................................................................................................... 4-4
4.1.4 Exchange steps ................................................................................................................................................................ 4-5
4.2 X Belt .................................................................................................................................................................................... 4-9
4.2.1 Introduction ...................................................................................................................................................................... 4-9
4.2.2 Tools, Material and Scheduling ................................................................................................................................ 4-10
4.2.3 Prerequisites ................................................................................................................................................................... 4-11
4.2.4 Exchange steps .............................................................................................................................................................. 4-12
4.3 Hybrid cable X drag chain .......................................................................................................................................... 4-19
4.3.1 Introduction .................................................................................................................................................................... 4-19
4.3.2 Tools, Material and Scheduling ................................................................................................................................ 4-19
4.3.3 Prerequisites ................................................................................................................................................................... 4-20
4.3.4 Exchange steps .............................................................................................................................................................. 4-20
5 Y Axis 5-1
5.1 Y Motor ............................................................................................................................................................................... 5-2
5.1.1 I
ntroduction ...................................................................................................................................................................... 5-2
5.1.2 Tools, Material and Scheduling .................................................................................................................................. 5-3
5.1.3 Prerequisites ..................................................................................................................................................................... 5-4
5.1.4 Exchange steps ................................................................................................................................................................ 5-4
5.2 Y Belt .................................................................................................................................................................................... 5-8
5.2.1 Introduction ...................................................................................................................................................................... 5-8
5.2.2 Tools, Material and Scheduling .................................................................................................................................. 5-9
5.2.3 Prerequisites ..................................................................................................................................................................... 5-9
5.2.4 Exchange steps .............................................................................................................................................................. 5-10
6 Z Axis 6-1
6.1 Z Motor ............................................................................................................................................................................... 6-5
6.1.1 Introduction ...................................................................................................................................................................... 6-5
6.1.2 Tools, Material and Scheduling .................................................................................................................................. 6-5
6.1.3 Prerequisites ..................................................................................................................................................................... 6-6
6.1.4 Exchange steps ................................................................................................................................................................ 6-7
00197973-10 / 02 , 2016 Contents
SIPLACE Mat. Tower Storage Service Manual © ASM v
6.2 Z Belt .................................................................................................................................................................................... 6-9
6.2.1 Introduction ...................................................................................................................................................................... 6-9
6.2.2 Tools, Material and Scheduling .................................................................................................................................. 6-9
6.2.3 Prerequisites ................................................................................................................................................................... 6-10
6.2.4 Exchange steps .............................................................................................................................................................. 6-11
6.3 Hybrid cable Z drag chain ......................................................................................................................................... 6-18
6.3.1 Introduction ................................................................................................................................................................... 6-18
6.3.2 Tools, Material and Scheduling ............................................................................................................................... 6-19
6.3.3 Prerequisites ................................................................................................................................................................... 6-19
6.3.4 Exchange steps .............................................................................................................................................................. 6-20
7 Gripper 7-1
7.1 Gripper complete with Y carriage ............................................................................................................................. 7-1
7.1.1 Introduction ...................................................................................................................................................................... 7-1
7.1.2 Tools, Material and Scheduling .................................................................................................................................. 7-2
7.1.3 Prerequisites ...................................................................................................................................................................... 7-2
7.1.4 Exchange steps ................................................................................................................................................................. 7-3
7.2 R-Belt (gripper rotation) ................................................................................................................................................ 7-9
7.2.1 Introduction ...................................................................................................................................................................... 7-9
7.2.2 Tools, Material and Scheduling ............................................................................................................................... 7-10
7.2.3 Prerequisites ................................................................................................................................................................... 7-10
7.2.4 Exchange steps .............................................................................................................................................................. 7-11
7.3 R Motor (gripper rotation) ......................................................................................................................................... 7-18
7.3.1 Introduction ................................................................................................................................................................... 7-18
7.3.2 Tools, Material and Scheduling ............................................................................................................................... 7-18
7.3.3 Prerequisites ................................................................................................................................................................... 7-19
7.3.4 Exchange steps .............................................................................................................................................................. 7-20
7.4 H Motor ............................................................................................................................................................................ 7-26
7.4.1 Introduction ................................................................................................................................................................... 7-26
7.4.2 Tools, Material and Scheduling ............................................................................................................................... 7-26
7.4.3 Prerequisites ................................................................................................................................................................... 7-27
7.4.4 Exchange and setup steps ........................................................................................................................................ 7-28
7.5 H Sensor ........................................................................................................................................................................... 7-30
7.5.1 Introduction ................................................................................................................................................................... 7-30
7.5.2 Tools, Material and Scheduling ............................................................................................................................... 7-30
Contents 00197973-10 / 02 , 2016
vi © ASM SIPLACE Mat. Tower Storage Service Manual
7.5.3 Prerequisites ................................................................................................................................................................... 7-31
7.5.4 Exchange and setup steps ......................................................................................................................................... 7-32
7.6 Reflection sensor WT2F-P140 ................................................................................................................................... 7-35
7.6.1 Introduction .................................................................................................................................................................... 7-35
7.6.2 Tools, Material and Scheduling ................................................................................................................................ 7-35
7.6.3 Prerequisites ................................................................................................................................................................... 7-36
7.6.4 Exchange and setup steps ......................................................................................................................................... 7-37
7.7 Fibre-optic sensor WLL170-2P132 .......................................................................................................................... 7-38
7.7.1 Introduction .................................................................................................................................................................... 7-38
7.7.2 Tools, Material and Scheduling ................................................................................................................................ 7-39
7.7.3 Prerequisites ................................................................................................................................................................... 7-39
7.7.4 Exchange and setup steps ......................................................................................................................................... 7-40
7.8 Optosensor LL3_DE02 ................................................................................................................................................. 7-42
7.8.1 Introduction .................................................................................................................................................................... 7-42
7.8.2 Tools, Material and Scheduling ................................................................................................................................ 7-42
7.8.3 Prerequisites ................................................................................................................................................................... 7-43
7.8.4 Exchange and setup steps ......................................................................................................................................... 7-44
8 Portal 8-1
8.1 T Motor ................................................................................................................................................................................ 8-3
8.
1.1 Introduction ...................................................................................................................................................................... 8-3
8.1.2 Tools, Material and Scheduling .................................................................................................................................. 8-3
8.1.3 Prerequisites ..................................................................................................................................................................... 8-4
8.1.4 Exchange steps ................................................................................................................................................................ 8-5
8.2 Retrofit XY-Z Sensor Calibration Tool ...................................................................................................................... 8-6
8.2.1 Introduction ...................................................................................................................................................................... 8-6
8.2.2 Tools, Material and Scheduling .................................................................................................................................. 8-6
8.2.3 Prerequisites ..................................................................................................................................................................... 8-7
8.2.4 Exchange steps ................................................................................................................................................................ 8-7
8.3 PM-L54P Portal Open/Close Sensor ......................................................................................................................... 8-8
8.3.1 Introduction ...................................................................................................................................................................... 8-8
8.3.2 Tools, Material and Scheduling .................................................................................................................................. 8-9
8.3.3 Prerequisites ..................................................................................................................................................................... 8-9
8.3.4 Exchange steps .............................................................................................................................................................. 8-10
8.4 Reel Detector .................................................................................................................................................................. 8-12