KHT_YSP_PL - 第36页
4 5 T ank / Pump / Feeder Cleaner KHT -1301 33 8 38 3 38 7 6 5 9 2 17 18 40 10 4 37 10 1 14 41 41 16 16 23 30 31 29 24 25 27 28 28 22 21 20 30 26 16 OLD 1 1 47 32 36 15 12 13 19 34 39 35 46 44 43 45 42 46 45 44 43 42 48 …
3
5
Cylinder / Roll Unit
Cleaner
KHT-1110
34
20
7
5
31
21
1
23
38
35
11
10
14
30
25
19
29
24>21
2
29
24>21
2
15
22
17
16
31
21
1
23
14
8
30
6
34
34
4
38
33
13
12
35
32
45
41
40
44
43
44
43
39
42
28
37
27
26
42
28
15
22
17
18
48
47
46
46
3
9
33
No. Part No. Part Name Q'ty Remarks Compati. Revision No.-date
1
90990-28J151 WASHER,PLAIN 2 OK MJ20016-2012/2/9
KHT-M3620-00 WASHER,PLAIN 2
2 KHT-M3625-00 HOLDER,DRY BRG. 2
3 KHT-M3629-00 STAY,SENSOR 1
4 KHT-M3670-00 COVER 1 1
5 KHT-M3671-01 COVER L 1
6 KHT-M3672-01 COVER R 1
7
KHT-M3674-02 TUBE 25 1 OK MK30038-2013/3/22
KHT-M3674-01 TUBE 25 1 L=1590mm OK MHX0073-2011/11/29
KHT-M3674-00 TUBE 25 1 L=1430mm
8 KHT-M6521-W0 SENSOR GAUZE ASSY 1
9 KHT-M6525-B0 SENS. ROLL SYL. ASSY 1
10 KHT-M6526-A1 SENS. CL-L HI ASSY 1
11 KHT-M6526-B1 SENS. CL-L LOW ASSY 1
12 KHT-M6526-C1 SENS. CL-R HI ASSY 1
13 KHT-M6526-D1 SENS. CL-R LOW ASSY 1
14 KGJ-M2619-00 CYLINDER,MASK 2
15
KHT-M3647-00 SPRING 2 2 OK MH00064-2011/11/4
KGJ-M3660-00 SPRING 2 2
16 KGY-M3650-00 SHAFT,SPRING 1
17 KGY-M3652-00 OIL FREE BUSH 2
18 KGY-M3655-00 SHAFT21,SPRING 1
19 KGY-M3663-00 PLATE,STOPPER 1
20 KGY-M3730-00 TUBE 25,BAND 1
21
90990-28J017 WASHER,PLAIN 6 OK MH00064-2011/11/4
90990-28J017 WASHER,PLAIN 2
22 90990-28J020 WASHER,PLAIN 2
23 90990-28J055 WASHER,PLAIN 2
24
Delete MH00064-2011/11/4
90990-28J081 WASHER,PLAIN 2
25 91312-03008 BOLT HEX.SOCKET HEAD 2 M3X8
26 91312-03020 BOLT,HEX.SOCKET HEAD 1 M3X20
27 91312-03025 BOLT,HEX.SOCKET HEAD 2 M3X25
28 91312-04008 BOLT HEX.SOCKET HEAD 8 M4X8
29 91312-05010 BOLT HEX.SOCKET HEAD 2 M5X10
30 91312-05055 BOLT HEX.SOCKET HEAD 4 M5X55
31 92012-05014 BOLT,BUTTON HEAD 2 M5X14
32 97602-03306 SCREW,PAN HEAD W/W 4
33 98902-03008 SCREW BINDING HEAD 3 M3X8
34 98902-04005 SCREW BINDING HEAD 10 M4X5
35 $TSH4-M5M JOINT 2
36 $UL4M JOINT 2
37 $UT4M JOINT 2
38 $SC4-M5A SPEED CONTROLLER 2
39
KHT-M3661-00 PIPE,PAPER 530 1 L=530
KGY-M3661-A0 PIPE,PAPER 440 1 L=440
KGY-M3661-B0 PIPE,PAPER 360 1 L=360
KGY-M3661-C0 PIPE,PAPER 260 1 L=260
40
KHT-M36C0-00 ROLL UNIT 530 1 L=530
KHT-M36C0-A1 ROLL UNIT 440 1 L=440 OK MH90038-2011/9/21
KHT-M36C0-B1 ROLL UNIT 360 1 L=360 OK MH90038-2011/9/21
KHT-M36C0-C1 ROLL UNIT 260 1 L=260 OK MH90038-2011/9/21
KHT-M36C0-A0 ROLL UNIT 440 1 L=440
KHT-M36C0-B0 ROLL UNIT 360 1 L=360
KHT-M36C0-C0 ROLL UNIT 260 1 L=260
41
KHT-M3622-00 NOZZLE,VACUUM 530 1 L=530
KHT-M3622-A0 NOZZLE,VACUUM 440 1 L=440
KHT-M3622-B0 NOZZLE,VACUUM 360 1 L=360
KHT-M3622-C0 NOZZLE,VACUUM 260 1 L=260
42
KHT-M3660-00 BENCOT,ROLL 530 1 L=530
KGY-M3660-A0 BENCOT,ROLL 440 1 L=440
KGY-M3660-B0 BENCOT,ROLL 360 1 L=360
KGY-M3660-C0 BENCOT,ROLL 260 1 L=260
KHT-M366S-00 ROLL SET, 530 1 L=530 10SET of parts numbers
KGY-M366S-A0 ROLL SET, 440 1 L=440 10SET of parts numbers
KGY-M366S-B0 ROLL SET, 360 1 L=360 10SET of parts numbers
KGY-M366S-C0 ROLL SET, 260 1 L=260 10SET of parts numbers
43
KHT-M3690-00 ADAPTER,530,R 2 L=530
KHT-M3690-A0 ADAPTER,440,R 2 L=440
KHT-M3690-B0 ADAPTER,360,R 2 L=360
KHT-M3690-C0 ADAPTER,260,R 2 L=260
44
KHT-M3662-A1 ADAPTER,440,L 2 L=440 OK MH90038-2011/9/21
KHT-M3662-B1 ADAPTER,360,L 2 L=360 OK MH90038-2011/9/21
KHT-M3662-C1 ADAPTER,260,L 2 L=260 OK MH90038-2011/9/21
KHT-M3662-A0 ADAPTER,440,L 2 L=440
KHT-M3662-B0 ADAPTER,360,L 2 L=360
KHT-M3662-C0 ADAPTER,260,L 2 L=260
45 91312-03008 BOLT HEX.SOCKET HEAD 22 M3X8
46 91312-04005 BOLT HEX.SOCKET HEAD 4 M4X5
47 92902-04600 WASHER PLAIN 2
48 KHT-M3638-00 BRKT.,SENSOR 1
4
5
Tank / Pump / Feeder
Cleaner
KHT-1301
33
8
38
3
38
7
6
5
9
2
17
18
40
10
4
37
10
1
14
41
41
16
16
23
30
31
29
24
25
27
28
28
22
21
20
30
26
16
OLD
11
47
32
36
15
12
13
19
34
39
35
46
44
43
45
42
46
45
44
43
42
48
No. Part No. Part Name Q'ty Remarks Compati. Revision No.-date
1 KHT-M3642-00 TUBE 6-330 2
2
Delete MK50034-2013/5/27
KHT-M3645-01 TUBE 4-15 1 15mm NG MG60017-2010/6/4
KHT-M3645-00 TUBE 4-23 1 23mm
3 KHT-M3650-00 TANK 1
4 KHT-M3653-00 CAP,TANK 1
5 KHT-M3654-00 GASKET,TANK 1
6 KHT-M3655-00 RUBBER SEAT 1
7 KHT-M3656-00 BRKT.,TANK R 1
8 KHT-M3657-00 BRKT.,TANK L 1
9
Delete MK50034-2013/5/27
$BF4-M3 JOINT 1
10 $BF6 JOINT 3
11 KHT-M3643-00 TUBE 6-540 1
12
KHT-M3644-01 TUBE 6-205 1 L=205mm NG MG30014-2010/6/4
KHT-M3644-00 TUBE 6-240 1 L=240mm
13 KHT-M6527-A0 SENSOR,SOL.PUMP ERR. 1
14 KHT-M6527-B0 PNP CHANGER ASSY 1
15
KHU-M3756-01 PUMP 1 OK MK50034-2013/5/27
KHU-M3756-00 PUMP 1
16
KHT-M3682-00 SOCKET 2 NG MG30014-2010/6/4
$BF6U JOINT 2 MFY0108-2009/12/22
17
Delete MK50034-2013/5/27
90990-41J092 COLLAR 1 MFY0108-2009/12/22
18
Delete MK50034-2013/5/27
KGY-M3732-00 SOLVENT FILTER 1 MF30082-2009/4/20
19 KHT-M3680-A0 SUPPLY BOTTLE ASSY. 1 MF30082-2009/4/20
20 KHT-M3681-00 HOLDER,JOINT 1 MF30082-2009/4/20
21 KHT-M3682-00 SOCKET 2 MF30082-2009/4/20
22 KHT-M3685-01 HOLDER,RING 1 MF30082-2009/4/20
23 KHT-M3687-00 TUBE 6-200 2 MF30082-2009/4/20
24 KHT-M3688-00 TUBE 6-150 1 MF30082-2009/4/20
25 KHT-M3689-00 BOTTLE 1 MF30082-2009/4/20
26
90K41-001350 LABEL,CAUTION 1 MJ30200-2012/4/20
90K41-000390 LABEL,ALERT 1 MF30082-2009/4/20
27
90K41-001340 LABEL,WARNING 1 MJ30200-2012/4/20
90K41-000410 LABEL,ALERT 1 MF30082-2009/4/20
28 92A08-03003 SET SCREW M3X3 2
29 $BF6 JOINT 1 MF30082-2009/4/20
30 $BF6U JOINT 4 MF30082-2009/4/20
31 $CF JOINT 2 MF30082-2009/4/20
32
KKX-M3659-01 POMP SECTION 1 OK MK50034-2013/5/27
KHT-M3659-00 POMP SECTION 1
33 KHT-M3652-00 PLUG 2
34 $BF6U JOINT 5
35 KHT-M3651-01 BRKT.,JOINT 1
36 91312-03005 BOLT HEX.SOCKET HEAD 2 M3X5
37 91380-03010 BOLT HEX.SOCKET HEAD 6 M3X10
38 91312-04005 BOLT HEX.SOCKET HEAD 7 M4X5
39 91312-03016 BOLT,HEX.SOCKET HEAD 2 M3X16
40
Delete MK50034-2013/5/27
URETHANE TUBE 1 Φ6x20mm BLACK($UB0640-BK) MG30014-2010/6/4
41 KHU-M3763-00 JOINT 2 MG30014-2010/6/4
42
KHT-M362E-B0 FILTER SUB ASSY. 1 NG ML10053-2014/1/30
KHT-M362E-A0 FILTER SUB ASSY. 1 NG MK50034-2013/5/27
43
KHT-M362E-10 FILTER,SOLVENT 1 NG ML10053-2014/1/30
KHT-M362E-00 FILTER,SOLVENT 1 NG MK50034-2013/5/27
44 90990-17J080 O-RING 1 NG MK50034-2013/5/27
45
KHT-M362J-02 JOINT,M3-6 1 NG ML30008-2014/3/5
KHT-M362J-00 JIONT,M3-6 1 NG MK50034-2013/5/27
46 90990-36J011 WASHER SEAL 1 NG MK50034-2013/5/27
47 $BF6U JOINT 1
48 KHT-M363L-A1 FILTER SUB ASSY. 1 OK ML10053-2014/1/30
1
6
Mask Camera / X-axis
MC&MS X-axis
KHT-1301
18
18
33
27
49
10
39
41
25
41
36
8
1
20
9
47
42
33
42
27
45
52
23
44
32
54
7
3
51
34
43
11
48
26
28
29
30
41
32
4
52
35
15
15
22
21
5
24
2
6
42
49
19
19
53
53
53
15
15
12
38
17
17
16
16
16
38
16
50
13
13
OLD
OLD
40
37
46
40
31
14
14
42
No. Part No. Part Name Q'ty Remarks Compati. Revision No.-date
1
KHT-M7601-02 PLATE 1,MS 1 OK MG30135-2010/3/26
KHT-M7601-01 PLATE 1,MS 1
2 KHT-M7602-01 PLATE 2,MS 1
3
KHT-M7603-01 BRACKET,MOTOR MS 1 Hole position change NG MK60080-2013/9/13
KHT-M7603-00 BRACKET,MOTOR MS 1
4
KHT-M7604-01 HOLDER BRG.,MS 1 Hole position change NG MK60080-2013/9/13
KHT-M7604-00 HOLDER BRG.,MS 1
5
KHT-M7605-02 HOLDER NUT,MS 1 Hole position change NG MK60080-2013/9/13
KHT-M7605-01 HOLDER NUT,MS 1
6
KHT-M7606-01 BALL SCREW,MS AXIS 1 KURODA NG MK60080-2013/9/13
KHT-M7606-00 BALL SCREW,MS AXIS 1 TSUBAKI
7 KHT-M7607-00 COUPLING 1
8 KHT-M7620-00 GUIDE,MS 1
9 90K81-200004 CAP C4 12
10 KHT-M7626-00 DOG,MS ORG. 1
11
KHT-M7627-01 BRKT.,STOPPER 1 Hole position change NG MK60080-2013/9/13
KHT-M7627-00 BRKT.,STOPPER 1
12 KHT-M7630-00 CABLE DUCT,MS 1
13
KHT-M7631-01 BRKT.1,DUCT 1 OK MG60080-2010/6/18
KHT-M7631-00 BRKT.1,DUCT 1
14
KHT-M7632-01 BRKT.2,DUCT 1 OK MG60080-2010/6/18
KHT-M7632-00 BRKT.2,DUCT 1
15 KHT-M7633-00 BRKT. 1,TAPE 4
16 KHT-M7635-00 PLATE,NUT 4
17 KHT-M7636-00 TAPE,MS DUCT 1
18
KHT-M7637-00 TAPE 2,MS DUCT 1
19 KHT-M7639-00 TAPE 4,X DUCT 1
20 KHT-M7641-00 COVER,B.S. 1
21 KHT-M7642-00 PLATE,TERMINAL 1
22 KHT-M7643-00 COVER,TERMINAL 1
23 KHT-M7645-00 BRKT.,HARNESS 1
24 KHT-M7654-00 HOLDER,SHAFT 1
25 KHT-M7655-00 SHAFT 1
26 KHT-M7656-00 SLIDE BUSH 1
27 KHT-M7531-00 COLLAR 2
28 KHT-M76A0-00 FIDUCIAL LIGHT ASSY 1
29 KJX-M7210-00 CCD CAMERA 1
30 KHT-M76B0-00 LENS FID. 1
31 $NK-2N NYLON CLIP 1
32 KG2-M2604-00 SUPPORT UNIT 1
33
KHT-M7629-00 DAMPER,MS 2 L=12mm NG MK60080-2013/9/13
KGY-M9115-00 DAMPER 2,W 2 L=13mm
34
90K63-911349 AC SERVO MOTOR 1 OK MG50154-2010/6/18
90K63-311349 AC SERVO MOTOR 1
35 98902-04005 SCREW BINDING HEAD 4 M4X5
36 KHT-M7645-10 BRKT,HARNESS 1
37 90990-11J001 SCREW PAN HEAD 1
38 98702-05008 SCREW FLAT HEAD 4 M5X8
39 92902-04200 WASHER PLAIN 2
40 91312-04005 BOLT HEX.SOCKET HEAD 8 M4X5
41 91312-04006 BOLT HEX.SOCKET HEAD 14 M4X6
42 91312-04008 BOLT HEX.SOCKET HEAD 18 M4X8
43 91312-04012 BOLT,HEX.SOCKET HEAD 4 M4X12
44 91312-04014 BOLT HEX.SOCKET HEAD 4 M4X14
45 91312-04016 BOLT,HEX.SOCKET HEAD 12 M4X16
46 91312-05008 BOLT HEX.SOCKET HEAD 2 M5X8
47 91312-05010 BOLT HEX.SOCKET HEAD 1 M5X10
48 91312-05012 BOLT HEX.SOCKET HEAD 2 M5X12
49 91312-05014 BOLT HEX.SOCKET HEAD 5 M5X14
50 91312-05020 BOLT HEX.SOCKET HEAD 2 M5X20
51 91312-05025 BOLT HEX.SOCKET HEAD 9 M5X25
52 91312-05030 BOLT HEX.SOCKET HEAD 5 M5X30
53 98902-03004 SCREW BINDING HEAD 8 M3X4
54 90990-41J079 COLLAR 1