KHT_YSP_PL - 第37页
1 6 Mask Camera / X-axis MC&MS X-axis KHT -1301 18 18 33 27 49 10 39 41 25 41 36 8 1 20 9 47 42 33 42 27 45 52 23 44 32 54 7 3 51 34 43 1 1 48 26 28 29 30 41 32 4 52 35 15 15 22 21 5 24 2 6 42 49 19 19 53 53 53 15 15…
4
5
Tank / Pump / Feeder
Cleaner
KHT-1301
33
8
38
3
38
7
6
5
9
2
17
18
40
10
4
37
10
1
14
41
41
16
16
23
30
31
29
24
25
27
28
28
22
21
20
30
26
16
OLD
11
47
32
36
15
12
13
19
34
39
35
46
44
43
45
42
46
45
44
43
42
48
No. Part No. Part Name Q'ty Remarks Compati. Revision No.-date
1 KHT-M3642-00 TUBE 6-330 2
2
Delete MK50034-2013/5/27
KHT-M3645-01 TUBE 4-15 1 15mm NG MG60017-2010/6/4
KHT-M3645-00 TUBE 4-23 1 23mm
3 KHT-M3650-00 TANK 1
4 KHT-M3653-00 CAP,TANK 1
5 KHT-M3654-00 GASKET,TANK 1
6 KHT-M3655-00 RUBBER SEAT 1
7 KHT-M3656-00 BRKT.,TANK R 1
8 KHT-M3657-00 BRKT.,TANK L 1
9
Delete MK50034-2013/5/27
$BF4-M3 JOINT 1
10 $BF6 JOINT 3
11 KHT-M3643-00 TUBE 6-540 1
12
KHT-M3644-01 TUBE 6-205 1 L=205mm NG MG30014-2010/6/4
KHT-M3644-00 TUBE 6-240 1 L=240mm
13 KHT-M6527-A0 SENSOR,SOL.PUMP ERR. 1
14 KHT-M6527-B0 PNP CHANGER ASSY 1
15
KHU-M3756-01 PUMP 1 OK MK50034-2013/5/27
KHU-M3756-00 PUMP 1
16
KHT-M3682-00 SOCKET 2 NG MG30014-2010/6/4
$BF6U JOINT 2 MFY0108-2009/12/22
17
Delete MK50034-2013/5/27
90990-41J092 COLLAR 1 MFY0108-2009/12/22
18
Delete MK50034-2013/5/27
KGY-M3732-00 SOLVENT FILTER 1 MF30082-2009/4/20
19 KHT-M3680-A0 SUPPLY BOTTLE ASSY. 1 MF30082-2009/4/20
20 KHT-M3681-00 HOLDER,JOINT 1 MF30082-2009/4/20
21 KHT-M3682-00 SOCKET 2 MF30082-2009/4/20
22 KHT-M3685-01 HOLDER,RING 1 MF30082-2009/4/20
23 KHT-M3687-00 TUBE 6-200 2 MF30082-2009/4/20
24 KHT-M3688-00 TUBE 6-150 1 MF30082-2009/4/20
25 KHT-M3689-00 BOTTLE 1 MF30082-2009/4/20
26
90K41-001350 LABEL,CAUTION 1 MJ30200-2012/4/20
90K41-000390 LABEL,ALERT 1 MF30082-2009/4/20
27
90K41-001340 LABEL,WARNING 1 MJ30200-2012/4/20
90K41-000410 LABEL,ALERT 1 MF30082-2009/4/20
28 92A08-03003 SET SCREW M3X3 2
29 $BF6 JOINT 1 MF30082-2009/4/20
30 $BF6U JOINT 4 MF30082-2009/4/20
31 $CF JOINT 2 MF30082-2009/4/20
32
KKX-M3659-01 POMP SECTION 1 OK MK50034-2013/5/27
KHT-M3659-00 POMP SECTION 1
33 KHT-M3652-00 PLUG 2
34 $BF6U JOINT 5
35 KHT-M3651-01 BRKT.,JOINT 1
36 91312-03005 BOLT HEX.SOCKET HEAD 2 M3X5
37 91380-03010 BOLT HEX.SOCKET HEAD 6 M3X10
38 91312-04005 BOLT HEX.SOCKET HEAD 7 M4X5
39 91312-03016 BOLT,HEX.SOCKET HEAD 2 M3X16
40
Delete MK50034-2013/5/27
URETHANE TUBE 1 Φ6x20mm BLACK($UB0640-BK) MG30014-2010/6/4
41 KHU-M3763-00 JOINT 2 MG30014-2010/6/4
42
KHT-M362E-B0 FILTER SUB ASSY. 1 NG ML10053-2014/1/30
KHT-M362E-A0 FILTER SUB ASSY. 1 NG MK50034-2013/5/27
43
KHT-M362E-10 FILTER,SOLVENT 1 NG ML10053-2014/1/30
KHT-M362E-00 FILTER,SOLVENT 1 NG MK50034-2013/5/27
44 90990-17J080 O-RING 1 NG MK50034-2013/5/27
45
KHT-M362J-02 JOINT,M3-6 1 NG ML30008-2014/3/5
KHT-M362J-00 JIONT,M3-6 1 NG MK50034-2013/5/27
46 90990-36J011 WASHER SEAL 1 NG MK50034-2013/5/27
47 $BF6U JOINT 1
48 KHT-M363L-A1 FILTER SUB ASSY. 1 OK ML10053-2014/1/30
1
6
Mask Camera / X-axis
MC&MS X-axis
KHT-1301
18
18
33
27
49
10
39
41
25
41
36
8
1
20
9
47
42
33
42
27
45
52
23
44
32
54
7
3
51
34
43
11
48
26
28
29
30
41
32
4
52
35
15
15
22
21
5
24
2
6
42
49
19
19
53
53
53
15
15
12
38
17
17
16
16
16
38
16
50
13
13
OLD
OLD
40
37
46
40
31
14
14
42
No. Part No. Part Name Q'ty Remarks Compati. Revision No.-date
1
KHT-M7601-02 PLATE 1,MS 1 OK MG30135-2010/3/26
KHT-M7601-01 PLATE 1,MS 1
2 KHT-M7602-01 PLATE 2,MS 1
3
KHT-M7603-01 BRACKET,MOTOR MS 1 Hole position change NG MK60080-2013/9/13
KHT-M7603-00 BRACKET,MOTOR MS 1
4
KHT-M7604-01 HOLDER BRG.,MS 1 Hole position change NG MK60080-2013/9/13
KHT-M7604-00 HOLDER BRG.,MS 1
5
KHT-M7605-02 HOLDER NUT,MS 1 Hole position change NG MK60080-2013/9/13
KHT-M7605-01 HOLDER NUT,MS 1
6
KHT-M7606-01 BALL SCREW,MS AXIS 1 KURODA NG MK60080-2013/9/13
KHT-M7606-00 BALL SCREW,MS AXIS 1 TSUBAKI
7 KHT-M7607-00 COUPLING 1
8 KHT-M7620-00 GUIDE,MS 1
9 90K81-200004 CAP C4 12
10 KHT-M7626-00 DOG,MS ORG. 1
11
KHT-M7627-01 BRKT.,STOPPER 1 Hole position change NG MK60080-2013/9/13
KHT-M7627-00 BRKT.,STOPPER 1
12 KHT-M7630-00 CABLE DUCT,MS 1
13
KHT-M7631-01 BRKT.1,DUCT 1 OK MG60080-2010/6/18
KHT-M7631-00 BRKT.1,DUCT 1
14
KHT-M7632-01 BRKT.2,DUCT 1 OK MG60080-2010/6/18
KHT-M7632-00 BRKT.2,DUCT 1
15 KHT-M7633-00 BRKT. 1,TAPE 4
16 KHT-M7635-00 PLATE,NUT 4
17 KHT-M7636-00 TAPE,MS DUCT 1
18
KHT-M7637-00 TAPE 2,MS DUCT 1
19 KHT-M7639-00 TAPE 4,X DUCT 1
20 KHT-M7641-00 COVER,B.S. 1
21 KHT-M7642-00 PLATE,TERMINAL 1
22 KHT-M7643-00 COVER,TERMINAL 1
23 KHT-M7645-00 BRKT.,HARNESS 1
24 KHT-M7654-00 HOLDER,SHAFT 1
25 KHT-M7655-00 SHAFT 1
26 KHT-M7656-00 SLIDE BUSH 1
27 KHT-M7531-00 COLLAR 2
28 KHT-M76A0-00 FIDUCIAL LIGHT ASSY 1
29 KJX-M7210-00 CCD CAMERA 1
30 KHT-M76B0-00 LENS FID. 1
31 $NK-2N NYLON CLIP 1
32 KG2-M2604-00 SUPPORT UNIT 1
33
KHT-M7629-00 DAMPER,MS 2 L=12mm NG MK60080-2013/9/13
KGY-M9115-00 DAMPER 2,W 2 L=13mm
34
90K63-911349 AC SERVO MOTOR 1 OK MG50154-2010/6/18
90K63-311349 AC SERVO MOTOR 1
35 98902-04005 SCREW BINDING HEAD 4 M4X5
36 KHT-M7645-10 BRKT,HARNESS 1
37 90990-11J001 SCREW PAN HEAD 1
38 98702-05008 SCREW FLAT HEAD 4 M5X8
39 92902-04200 WASHER PLAIN 2
40 91312-04005 BOLT HEX.SOCKET HEAD 8 M4X5
41 91312-04006 BOLT HEX.SOCKET HEAD 14 M4X6
42 91312-04008 BOLT HEX.SOCKET HEAD 18 M4X8
43 91312-04012 BOLT,HEX.SOCKET HEAD 4 M4X12
44 91312-04014 BOLT HEX.SOCKET HEAD 4 M4X14
45 91312-04016 BOLT,HEX.SOCKET HEAD 12 M4X16
46 91312-05008 BOLT HEX.SOCKET HEAD 2 M5X8
47 91312-05010 BOLT HEX.SOCKET HEAD 1 M5X10
48 91312-05012 BOLT HEX.SOCKET HEAD 2 M5X12
49 91312-05014 BOLT HEX.SOCKET HEAD 5 M5X14
50 91312-05020 BOLT HEX.SOCKET HEAD 2 M5X20
51 91312-05025 BOLT HEX.SOCKET HEAD 9 M5X25
52 91312-05030 BOLT HEX.SOCKET HEAD 5 M5X30
53 98902-03004 SCREW BINDING HEAD 8 M3X4
54 90990-41J079 COLLAR 1
2
6
Main Stopper / Sensor
MC&MS X-axis
KHT-1301
35
50
23
19
48
47
32
30
9
31
L>R
R>L
1
49
2
8
29
28
24
24
3
3
24
40
41
41
39
25
38
37
40
25
38
37
37
40
24
25
5
5
12
43
35
22
7
7
24
24
35
11
22
43
25
25
14
14
4
10
6
18
13
27
16
34
26
34
17
28
2
OLD
30
20
36
42
21
41
41
39
25
38
37
40
25
OLD
OLD
OLD
OLD
38
47
46
44
45
33
15
OLD
5
fig.1
fig.2
51
OLD
fig.3
5
12
43
52
OLD
13
43
35
53
No. Part No. Part Name Q'ty Remarks Compati. Revision No.-date
1 KHT-M7608-00 BRKT.,CYL. 1
2
KHT-M7660-A0 MS CLY. ASSY. 1 OK MG30150-2010/3/26
KHT-M7609-00 CYL.1,MS 1
3
KHT-M7610-01 PLATE 3,MS 1 NG MF60290-2009/7/2
KHT-M7610-00 PLATE 3,MS 1
4 KHT-M7611-00 GUIDE 1
5
KHT-M7612-03 BRKT.,MS 1 SET MK60080-2013/9/13
KHT-M7612-02 BRKT.,MS 1 g.3 NG MF60290-2009/7/2
KHT-M7612-01 BRKT.,MS 1 g.2 NG MF50115-2009/5/26
KHT-M7612-00 BRKT.,MS 1 g.1
6 KHT-M7613-00 CYL.2,MS 1
7
KHT-M7614-01 JOINT,CYL. 1 NG MF60290-2009/7/2
KHT-M7614-00 JOINT,CYL. 1
8 KHT-M7616-00 BRKT.,HARNESS 1
9 KHT-M7617-00 HOLDER,CAMERA 1
10 KHT-M7621-00 BRKT.,CYL. 1
11 KHT-M7622-00 JOINT,CYL. 1
12
KHT-M7623-02 DOG MS 1 Slotted hole 3.5x5 OK ML20094-2014/2/28
KHT-M7623-01 DOG MS 1 H=24 OK MK00026-2013/10/11
KHT-M7623-00 DOG MS 1 H=26
13
KHT-M7624-01 STAY,SENSOR MS 1 OK ML20094-2014/2/28
KHT-M7624-00 STAY,SENSOR MS 1
14
KHT-M7658-00 BLOCK, STOPPER 1 width 8mm NG MF50115-2009/5/26
KGY-M9161-00 BLOCK,STOPPER 1 width 10mm
15
KHT-M6521-M2 SENSOR MS ORG ASSY 1 L=120mm NG MF50150-2009/5/29
KHT-M6521-M1 SENSOR MS ORG ASSY 1 L=140mm
16 KHT-M6524-F0 SENS. M-ST BACK ASSY 1
17 KHT-M6524-G0 SENS. M-ST UP ASSY 1
18 KHT-M6536-A0 SENS. M-ST LOW ASSY 1
19
KHT-M6532-A0 SENS. PCB POS. ASSY
1
20 $TSH4-M5M JOINT 2
21 $UEF4BU-M3 JOINT 2
22 90990-28J071 WASHER,PLAIN 2
23 90990-11J003 SCREW,PAN HEAD W/W 23
24
91312-03006 BOLT HEX.SOCKET HEAD 5 M3X6 MK60080-2013/9/13
91312-03006 BOLT HEX.SOCKET HEAD 7 NG MF60290-2009/7/2
91312-03006 BOLT HEX.SOCKET HEAD 11 M3X6
25 91312-03008 BOLT HEX.SOCKET HEAD 5 M3X8
26 91312-03045 BOLT HEX.SOCKET HEAD 2 M3X45
27 91312-04006 BOLT HEX.SOCKET HEAD 2 M4X6
28 91312-04010 BOLT HEX.SOCKET HEAD 3 M4X10
29 91312-04014 BOLT HEX.SOCKET HEAD 1 M4X14
30 91312-04030 BOLT HEX.SOCKET HEAD 6 M4X30
31 91312-05050 BOLT HEX.SOCKET HEAD 3 M5X50
32 97002-05020 BOLT,HEXAGON 2 M5X20
33 98502-03006 SCREW PAN HEAD 2 M3X6
34 98902-03008 SCREW BINDING HEAD 3 M3X8
35
92902-03200 WASHER PLAIN 5 ML20094-2014/2/28
92902-03200 WASHER PLAIN 3
36 $NK-2N NYLON CLIP 23
37
KHT-M7615-01 BRKT.,SENSOR 1 NG MF60290-2009/7/2
KHT-M7615-00 BRKT.,SENSOR 1
38
KHT-M7651-01 STAY,SENSOR 1 OK MF60290-2009/7/2
KHT-M7651-00 STAY,SENSOR 1
39
KHT-M7652-00 LIGHT FIBER 1 MF60290-2009/7/2
KHT-M7652-00 LIGHT FIBER 2
40
KHT-M7653-00 PLATE,NUT 1 OK MF60290-2009/7/2
KGY-M9174-00 NUT,SENSOR 1
41 92A08-03003 SET SCREW 2 M3X3
42 $US4 JOINT 2
43
91312-03005 BOLT HEX.SOCKET HEAD 10 M3X5 ML20094-2014/2/28
91312-03005 BOLT HEX.SOCKET HEAD 8 M3X5 MK60080-2013/9/13
91312-03005 BOLT HEX.SOCKET HEAD 4
44 KHT-M7625-01 STAY,SENSOR 1
45
Delete MF60290-2009/7/2
K46-M641F-00 PARTS 1-3(STOPPER) 2
46 92902-04600 WASHER PLAIN 2
47 91312-04008 BOLT HEX.SOCKET HEAD 4 M4X8
48 KHT-M7657-00 BRKT, AMP. 1
49 91312-03016 BOLT HEX.SOCKET HEAD 4 M3X16
50 90990-33J005 BOLT, STOPPER 1
51 99480-04008 PIN PARALLEL 2
52 KHT-M7619-00 BLOCK,MS 1 SET MK60080-2013/9/13
53 KHT-M762A-00 STAY 2,SENSOR MS 1 ML20094-2014/2/28