N7201A707C - 第296页
NPM-W X / W XS EJM9DC-MB-04T-00 负荷配置图 2 故障排除 4-1 4-1 -3 基板传送带 ( 单式 ) 基板支架 ( 单式 ) B1224 B1225 B1020 B1021 B1022 B1023 B1030 B1031 B1124 B1125 B1132 B1133 M611 M613 M610 M612 M619 M614 M616 M617 M615 B121R B123 R4212 R4712…
NPM-WX / WXS EJM9DC-MB-04T-00
4-1-2
设备部
G111
M502
R4200
R4202
B1110
M508
R4704
R4706
R4705
R4205
M504
M506
R4032
R4132
R301
G211
G112
G111
M501
G113 B113
R4204
R4206
B1010
R4700
R4702
R4701
R4201
M503
NPM-WX / WXS EJM9DC-MB-04T-00
负荷配置图 2
故障排除
4-1
4-1-3
基板传送带(单式)
基板支架(单式)
B1224
B1225
B1020
B1021
B1022
B1023
B1030
B1031
B1124
B1125
B1132
B1133
M611
M613
M610
M612
M619
M614
M616
M617M615B121RB123
R4212
R4712
R4710
R4711
R4210
R4211
B1724
B1725
NPM-WX / WXS EJM9DC-MB-04T-00
4-1-4
基板传送带(双重)
基板支架(双重)
B1020
B1021
B1022
B1023
B1030
B1031
B1124
B1125
B1132
B1133
M629
M622
M620
M623
M621
B126
M611
M613
M610 M612
B1024
B1025
B1032
B1033
B1120
B1121
B1122
B1123
B1130
B1131
M619
B121R
B123
M614
M616
B122
M615
M617
M625
M627M626M624B125RB124
R4210
R4211
R4710
R4711
R4212
R4712
R4215
R4213
R4214
R4713
R4714
R4715
B1724
B1725
B1224
B1225
B1226
B1227
B1726
B1727