07_Parts List_N7203A339B00 - 第190页
34-A マスククリーニング (R):DSP M ask Cl eani ng(R) :DSP パーツレイアウト Ki t N o . キット 品番 Kit N am e キット名称 N6 1009 321 4AA ｾｸｼｮﾝNo. PARTS LAYOUT Section No. - - S177 ( KN610093214AA-11-1 )
Ref
No.
Remarks
R
1
Q'ty
33-B
溶剤
供
給
ユニット(F):DSP
Solvent supply unit(F):DSP
ｲﾗｽﾄ
No.
Part No.
品 名品番 数量
R
2
パーツリスト
Kit N
o
.
キット品
番
Kit Name
キット名称
N610108530AA
Part Name
備 考
ｾｸｼｮﾝNo.
PARTS LIST
Section No.
R
3
PIPE
1
1 N210101770AB
PIPE
1
2 N210085785AD
BRACKET
1
3 N210117236AC
PW004A0
2
4 KXFB01CCA00
TANK
1
5 N610027765AA
FILTER
1
6 N610009394AA
TUBE
1
7 N610083050AA
SENSOR(200-380mm)
1
8 N610110575AA
JOINT
2
9 N510001412AA C4N6X4-PT1/8-S
PUMP
1
10 N510048045AA PB1013-01-X31
JOINT
1
11 KXF0DYT5A00 KQ2H04-01S
JOINT
2
12 N510001107AA L4N6X4-PT1/8ST
JOINT
1
13 N510036675AA PPU6
VALVE
1
14 N510001478AA
A
NCV-304-Rc1/8-P
PLATE
2
15 KXF05EMAA00 GP5-1
NUT
2
16 XNH16CVW Hexagon nut Type3 Best class M16-6H-A2-70
BOLT
2
17 N510017536AA
SSS 003 Hexagon socket button head screw M4X8-10.9 A2J (Trivalent)
Process Pump Kit:DSP
1
18 N610113253AA
S176
--
( KN610108530AA-05-2 )
34-A
マスククリーニング(R):DSP
Mask Cleaning(R):DSP
パーツレイアウト
Ki
t
N
o
.
キット
品番
Kit Name
キット名称
N610093214AA
ｾｸｼｮﾝNo.
PARTS LAYOUT
Section No.
--
S177
( KN610093214AA-11-1 )
Ref
No.
Remarks
R
1
Q'ty
34-A
マスククリーニング(R):DSP
Mask Cleaning(R):DSP
ｲﾗｽﾄ
No.
Part No.
品 名品番 数量
R
2
パーツリスト
Kit N
o
.
キット品
番
Kit Name
キット名称
N610093214AA
Part Name
備 考
ｾｸｼｮﾝNo.
PARTS LIST
Section No.
R
3
BRACKET
1
1 N210132186AA
PLATE
1
2 N210116872AC
COLLAR
1
3 N210116873AA
SHAFT
1
4 N210116874AA
PLATE
1
5 N210116890AC
SHAFT
1
6 N210116891AB
COLLAR
1
7 N210041935AB
COLLAR
1
8 N210041934AA
STOPPER
1
9 N210124930AA
BRACKET
1
10 N210116901AA
DOG
1
11 N210118896AA
BRACKET
1
12 N210118808AB
COVER
1
14 N210132188AA
BRACKET
1
15 N210132054AA
BRACKET
1
16 N210132057AA
BRACKET
1
17 N210132058AA
Paper Brake
1
18 N610027117AA
SENSOR(SX911:200mm)
1
19 N610099745AA
A
BOLT
6
20 N510017539AA
SSS 003 Hexagon socket button head screw M5X12-10.9 A2J (Trivalent)
BEARING
1
21 N510034087AA 6200ZZ
KEY
1
22 N510020792AA 87KED3-10
TORQUE-LIMITER
1
23 KXF0DXBAA00 OTLC 6-300B
PIN
1
24 KXF0DX9GA00 SPP1.6-8
MOTOR
1
25 N510049339AA
S
PK564PMA-A2
SPACER
4
26 KXF03W8AA00 CU-410
BEARING
1
27 KXF00MQAA00 6903ZZ
SPRING-PIN
2
29 N510037716AA 1010801-25025
SCREW
6
30 N510018279AA
Cross recessed Truss head machine screw M4X6-4.8 A2J (Trivalent)
CYLINDER
1
31 N510049395AA SSD-K-25-10-FL419645
BOLT
16
32 N510017557AA
SSS 003 Hexagon socket button head screw M6X16-10.9 A2J (Trivalent)
JOINT
2
33 N431KQ2V04M5 KQ2V04-M5
SPACER
1
34 N510038217AA ASF-650E
SCREW
1
35 N510018452AA
Hexagon socket set screw Flat point M6X25-45H A2J (Trivalent)
SPACER
1
36 N510047122AA 3382330-60110
BOLT
2
37 N510028610AA SSH-M3X6
S178
--
( KN610093214AA-11-1 )