prober-english - 第11页

FPD ■ PROBE SYST EM FOR FPD Model HSP-FPD series Semi ‐ Automatic Prober  for  Flat ‐ Panel  Display Function examples of syste ms for small to mediu m-sized panels Common  gate  pad  probin g  (on  sub ‐ platen)…

■ PROBE SYSTEM FOR FPD

FPD

ManualProberforFlat‐PanelDisplay

Wecustom‐makemanualprobersthatsupportFPDs (flat‐paneldisplay)rangingfromsmalltolargeglasssubstrates.

Amicroscopeandprobingareawithawiderangeofmotionallowstableprobingacrossthepanelsurface.

Aheatingtype(upto+200°C)orthermaltype(‐40°Cto+200°C)can

beselectedfortherectanglepanelchuckand

ultralowcurrentmeasurementsonthefAlevelandC‐VmeasurementsonthesubpFlevelaresupportedforalltemperature

zones.

Thisproberalsosupportslightirradiationonthepanelsurface bythesolarsimulatororotherdeviceandlightirradiationon

the

bottom sideofpanel(backlight)bysuper‐highluminancewhiteLED.

Lightirradiationonthebottom sideofpanel

byultrahighluminosityLED

(upto40,000cd/cm2) *Sub‐stage

Lightirradiationonthepanelsurfaceby

thesolarsimulatororotherdevice

Built‐inlasercutter

(laserwavelength:1064,532,355,266nm)

Ultrahigh‐accuracymodelforstable

probingof

submicronpatterns

Function examples of systems for small to medium-sized panels

Model HMP-FPD series

Widerangeprobingareathatenableslayout

of FPDdevices.

ProbeSystemforFPD

FPD

■ PROBE SYSTEM FOR FPD

Model HSP-FPD series

Semi‐Automatic ProberforFlat‐PanelDisplay

Function examples of systems for small to medium-sized panels

Commongatepadprobing(onsub‐platen)

‐ WiderangemicroscopeX‐Ytravel

‐ Widerangeprobingarea

‐ ProgrammableX‐Y‐Zpositioner(manipulator)

Wecustom‐makeSemi‐automatic probersthatsupportFPDs (flat‐paneldisplay)rangingfromsmalltolargeglasssubstrates.

Amicroscopeandprobingareawithawiderangeofmotionallowstableprobingacrossthepanelsurface.

Aheatingtype(upto+200°C)orthermaltype(‐40°Cto+200°C)can

beselectedfortherectanglepanelchuckand

ultralowcurrentmeasurementsonthefAlevelandC‐VmeasurementsonthesubpFlevelaresupportedforalltemperature

zones.

ProbeSystemforFPD

High/Lowtemperaturemodel（‐60゜C～ +200゜C）

25mm sq.

Model HMP-V80 series

CompactVacuumProberforR&D(atUltraLowtoUltraHighTemperatures)

ThisisacompactvacuumproberforR&DthatsupportsI‐V/C‐V/RFmeasurementson5‐mmto25‐mmsamples.

Thereareavarietyofmodelsavailablesuchasonethatsupportstemperaturetestsatultralowtemperaturesonthe

4klevelandonethatsupports

thetemperaturetestsatupto+500°C.

Substrate Size

General

Ultimatevacuum*

Numberofmeasurementchannels

Measurementfeed‐throughconnector*

Probe X‐Y‐Ztravel

Magnification*

Illuminatingapparatusformicroscopes*

ProbeAdjustmentsensitivity

5mm～ 20mm square

1x10E‐4Pa

40x～ 240x(onmonitor)

LEDring lighti ng

2～ 7(6‐ probemaximum，1‐ chuck)

Hermetically triaxial(Jack)standard

X30mm,Y50mm, Z15mm

＜0.01mm

Microscopemovement*

Microscopetype

3jointhorizontalswingarm

CCDmono‐scopewithLCDmonitor

*Itemswithasteriskvarydependingonsystemconfiguration.

Movements

Microscope

Roomtemperatureorultralowtemperaturemodel

Model Temperaturerange Heatingmethod Coolingmethod

HMP‐V80 Ambient None None

HMP‐V80‐LH

4.2kto298k(+25°C)

Heater Liquidheliumtransfer

HMP‐V80‐LHM

8klevelto473k(+2 00°C)

Heater Liquidheliumtransfer

HMP‐V80‐LHH

10klevelto573k(+300°C)

Heater Liquidheliumtransfer

HMP‐V80‐LN

80kto298k(+25°C)

Heater Liquidnitrogencryostat

HMP‐V80‐LNM

80kto473k(+200°C)

Heater Liquidnitrogencryostat

HMP‐V80‐LNH

80kto573k(+300°C)

Heater Liquidnitrogencryostat

HMP‐V80‐PS

80kto298k(+25°C)

Heater FreePistonStirlingcooler

Ultrahightemperaturemodel

Model Temperaturerange Heatingmethod Coolingmethod

HMP‐V80

R.T.to+300°C

Heater Compressedair

HMP‐V80‐LH

R.T.to+400°C

Heater Compressedair

HMP‐V80‐LHM

R.T.to+500°C

Heater Compressedair

Common specification

■ VACUUM PROBE SYSTEM

Vacuumprobesystem