Parts List (Mechanical Parts) - 第71页
X-Yﾃ-ﾌﾞﾙ部(X軸駆動部) X-Y TABLE S ECT.(X-AXIS DR IVING SECT.) 3 F10871-04-000-AF_0 2-1 M53
PART NAME
REMARKS
Q'TY
2
ｶﾊﾞｰ部(ｽﾍﾟｰｻ部）
COVER SECT.(SPACER SECT.)
ｲﾗｽﾄ
No.
REF
No.
PART No.
部 品 品 番 個数 備 考
R
1
R
2
1 1046902380
SPACER UNIT ｽﾍﾟｰｻﾕﾆｯﾄ
2
381 104690238101
SPACER ｽﾍﾟｰｻ
M52
F10469-02-380-AA
X-Yﾃ-ﾌﾞﾙ部(X軸駆動部)
X-Y TABLE SECT.(X-AXIS DRIVING SECT.)
3
F10871-04-000-AF_02-1
M53
PART NAME
REMARKS
Q'TY
3
X-Yﾃ-ﾌﾞﾙ部(X軸駆動部)
X-Y TABLE SECT.(X-AXIS DRIVING SECT.)
ｲﾗｽﾄ
No.
REF
No.
PART No.
部 品 品 番 個数 備 考
R
1
R
2
1 1087104000
X-Y TABLE UNIT X-Y ﾃｰﾌﾞﾙﾕﾆｯﾄ
1
004 108710400402
BRACKET(MOTOR) ﾌﾞﾗｹｯﾄ(ﾓｰﾀ)
1
006 108710400601
HOUSING ﾊｳｼﾞﾝｸﾞ
1008 X01L21035
SLIDE BEARING ｼﾞｸｳｹ
3013 108710401302
BRACKET ﾌﾞﾗｹｯﾄ
1
014 1087104014
DOG FOR SENSOR ｾﾝｻﾄﾞｸﾞ
1
022 108710402203
COVER ｶﾊﾞｰ
1038 N210028631AA
COVER(BEARING) ｶﾊﾞｰ(ﾍﾞｱﾘﾝｸﾞ)
SFC-035SA2-9B-14B
1
N007
N510010689AA
COUPLING ｶｯﾌﾟﾘﾝｸﾞ
FU00SS
1
N008
N510004723AA
NUT ﾅｯﾄ
7000ADBC8P5
1
N009
N510003427AA
BEARING ﾍﾞｱﾘﾝｸﾞ
6201ZZ
1
N010
XLC6201ZZ
BALL BEARING ﾎﾞｰﾙﾍﾞｱﾘﾝｸﾞ
WSSB16-5-2
1
N011
N560WSSB1652
WASHER ｻﾞｶﾞﾈ
P921S1
1
N012
N310P921S1
SENSOR ｾﾝｻ
PANADAC921SA1
2
N013
N310P921SA1
SENSOR ｾﾝｻ
WSSB15-10-3
1
N026
N560WSSB-249
WASHER ｻﾞｶﾞﾈ
GZ1510ES-ZAPR-0744X069
1
N030
N510021862AA
BALL SCREW ﾎﾞｰﾙﾈｼﾞ
MSM042AJA S
1
V 1 308710400101
MOTOR ﾓｰﾀ
M54
F10871-04-000-AF_02-1