4OM-1054-002 - 第194页
Error ID Item Description 0e0101 C a m e r a - Y A xi s O r i g i n Output signal from the pulse motor driver was not detected. (Cause 1) This error occurs when the optical beam of the sensor is always kept in the "…
3.3 Error IDs and Remedial Procedures
Error ID Item Description
0d0102 Camera-X Axis Origin Origin sensor(slit) was not detected. ; BPH7 E/R
0d0103 Camera-X Axis Origin Origin sensor(slide) was not detected. ; BPH1 E/R
0d0104 Camera-X Axis Origin Feedback value is indefinite.
0d0105 Camera-X Axis Origin The camera-x is not at origin.
0d0106 Camera-X Axis Origin The camera-x was not completely zero during the set time.
0d0201 Camera-X Axis Timing Task has not been completed unable to continue.
0d0301 Camera-X Axis Data The driver data was detected outside of the possible range.
(Cause 1) Self-Diagnostics Error Message
(Remedy 1) Zero all axes and re-start the operation.
When the machine cannot be set to its normal condition, consult our service
personnel for the remedy.
0d0401 Camera-X Axis Limit Limit error has been detected. ; BPH2 E/NR
0d0402 Camera-X Axis Limit Limit error has been detected. ; BPH3 E/NR
(Cause 1) When Camera X was activated, the optical beam of the sensor was shielded.
(Remedy 1) Press the [RETURN] button to cancel the error display and remove the cause.
0d0601 Camera-Y Axis Communication Controller incomplete resulting in an overtime alarm.
(Cause 1) Self-Diagnostics Error Message
(Remedy 1) Zero all axes and re-start the operation.
When the machine cannot be set to its normal condition, consult our service
personnel for the remedy.
0307-005 2-76 AGS01ETRP
Error ID Item Description
0e0101 Camera-Y Axis Origin Output signal from the pulse motor driver was not detected.
(Cause 1) This error occurs when the optical beam of the sensor is always kept in the "E/NR"
or the "E/R" condition during zeroing operation on all axes. (E/NR: Light Emitted and
Not Received, E/R: Light Emitted and Received)
(Remedy 1) Press the [RETURN] button to cancel the error display and check if the optical
beam is always kept in the "E/NR" or the "E/R" condition due to dirt on the sensor
or because the sensor is defective.
Cover the optical beam of the sensor with a piece of paper and check if the beam
of light can be shielded or received.
0e0102 Camera-Y Axis Origin Origin sensor(slit) was not detected. ; BPH4 E/R
0e0103 Camera-Y Axis Origin Origin sensor(slide) was not detected. ; BPH8 E/R
0e0104 Camera-Y Axis Origin Feedback value is indefinite.
0e0105 Camera-Y Axis Origin The camera-x is not at origin.
0e0106 Camera-Y Axis Origin The camera-x was not completely zero during the set time
(Cause 1) Self-Diagnostics Error Message
(Remedy 1) Zero all axes and re-start the operation.
When the machine cannot be set to its normal condition, consult our service per-
sonnel for the remedy.
.
0e0201 Camera-Y Axis Timing Task has not been completed unable to continue.
0e0301 Camera-Y Axis Data The driver data was detected outside of the possible range.
(Cause 1) Self-Diagnostics Error Message
(Remedy 1) Zero all axes and re-start the operation.
When the machine cannot be set to its normal condition, consult our service
personnel for the remedy.
3.3 Error IDs and Remedial Procedures
0307-005 2-77 AGS01ETRP
Error ID Item Description
0e0401 Camera-Y Axis Limit Limit error has been detected. ; BPH5 E/NR
0e0402 Camera-Y Axis Limit Limit error has been detected. ; BPH6 E/NR
(Cause 1) When Camera Y was activated, the optical beam of the sensor was shielded.
(Remedy 1) Press the [RETURN] button to cancel the error display and remove the cause of
the error.
Zero all axes and re-start the operation.
0e0601 Camera-Y Axis Communication Controller incomplete resulting in an overtime alarm.
(Cause 1) Self-Diagnostics Error Message
(Remedy 1) Zero all axes and re-start the operation.
When the machine cannot be set to its normal condition, consult our service
personnel for the remedy.
0f0101 Transfer Origin Output signal from the pulse motor driver was not detected.
0f0102 Transfer Origin Lower limit of x/y table chute was not detected. ; ls15/PHS61
0f0103 Transfer Origin Upper limit of x/y table chute was not detected.
; BPH60 E/NR
0f0104 Transfer Origin Lower limit of transfer was not detected. ; BPH40 E/NR
0f0105 Transfer Origin Upper limit of transfer was not detected. ; BPS1
0f0106 Transfer Origin P.C.B. transfer was not at stop position.
0f0107 Transfer Origin The transfer was not completely zero during the set time.
0f0201 Transfer Timing Task has not been completed unable to continue.
0f0301 Transfer Data The driver data was detected outside of the possible range.
0f0302 Transfer Data The driver data was error.
(Cause 1) Self-Diagnostics Error Message
(Remedy 1) Zero all axes and re-start the operation.
When the machine cannot be set to its normal condition, consult our service
personnel for the remedy.
3.3 Error IDs and Remedial Procedures
0307-004 2-78 AGS01ETRP