5OM-1625-003_w.pdf - 第185页

5OM-1603 5-4 1 102-004J(01300-6) Side Panel L X10520-10 X10520-9 A21,A22,A23(R) #L11 A21,A22,A23(F) #L11 A21,A22,A23(R) #L21 A21,A22,A23(F) #L21 NOISE FILTER:Z02 Q206-1,3 Q201-1,3,5 K10-1,3,5 K28-1,3 K28-2,4 External Uni…

5OM-1603

5-31102-004A(13AAF)

Beam Relay Panel Connection Diagram_Robot Cable 2

-X2200

-X12102

-X12410

-X12201

-X22501

-X22507

-X1E39

-X13601

-M22

-X12501

-X3601

-B2101

-B2102

-B2202

-E39

-U21

-U22

5OM-1603

5-41102-004J(01300-6)

Side Panel L

X10520-10

X10520-9

A21,A22,A23(R) #L11

A21,A22,A23(F) #L11

A21,A22,A23(R) #L21

A21,A22,A23(F) #L21

NOISE FILTER:Z02

Q206-1,3

Q201-1,3,5

K10-1,3,5

K28-1,3

K28-2,4

External Unit Bundled Connector (R)

External Unit Bundled Connector (F)

OP: Coplanarity Detection Power Supply

CPU 1,CPU 3 Power Supply

CPU 2 Power Supply

Black

Green/Yellow

Black

Note 4

Note 3

Note 1

Note 2

Note 1

Note 2

Note 1

Note 3

Note 4

Note 3

Note 1

Note 3

Note 1

Note 3

Note 1

Black

Blue

Brown

Grounding Green/Yellow

White

Grounding Green/Yellow

Red

Black

White

Grounding Green/Yellow

Red

Black

White

Grounding

Red

Black

Light Blue

Brown

Grounding Green/Yellow

Light Blue

5OM-1603

5-51102-004D(01300-7)

Side Panel C 1

Green/Yellow

BlackRed

White

Black

Blue

Black

Blue

Red

Yellow

Red

Black

Red

White

Black

K3-34

K38-A22

U07:X27163-1

K33A-13

TB:P1

14AWG Green / Yellow

K33A-1,3,5

U07:X2723-2

TB:DC1(10A)

Vacuum Pump

G01,G02,G04,G07 Power Supply

TB:DC1(24A1)

TB:DC1(24A2)