5OM-1625-003_w.pdf - 第92页
5OM-1603 2-13 Sensor and Load Layout 0908-002 Nozzle Stocker Section Layout B0622 B0922 B0618 B0918 B0620 B0920 Y0636 Y0936 Y0635 Y0935 Upper Stage: Front V iew Lower Stage: Rear V iew Symbol Name Symbol Name Y0635 Nozzl…
5OM-1603
2-12
Sensor and Load Layout
1102-003
Head Section Layout (Head U/D Section)
M34
B3106
B3103
Symbol Name Symbol Name
M34 Head U/D (HL) Motor
B3103 Head U/D (+) Limit
B3106 Head U/D (-) Limit
5OM-1603
2-13
Sensor and Load Layout
0908-002
Nozzle Stocker Section Layout
B0622
B0922
B0618
B0918
B0620
B0920
Y0636
Y0936
Y0635
Y0935
Upper Stage: Front View
Lower Stage: Rear View
Symbol Name Symbol Name
Y0635 Nozzle Stocker 2 Shutter Open/Close 1 Y0935 Nozzle Stocker 1 Shutter Open/Close 1
Y0636 High-speed Nozzle Stocker 2 Ascending 1 Y0936 High-speed Nozzle Stocker 1 Ascending 1
B0618 High-speed Nozzle Stocker 2 B0918 High-speed Nozzle Stocker 1
Unit Lower Limit Detection 1 Unit Lower Limit Detection 1
B0620 High-speed Nozzle Stocker 2 B0920 High-speed Nozzle Stocker 1
Shutter Close Check 1 Shutter Close Check 1
B0622 High-speed Nozzle Stocker 2 Clamp Check 1 B0922 High-speed Nozzle Stocker 1 Clamp Check 1
5OM-1603
2-14
Sensor and Load Layout
1102-003
Conveyor Section Layout (Outside)
8
10 101010
8
55 55
4444
44
KL
KL
KR
KR
4
6
4
6
4
6
4 4
6
4
8
4
8
8
5 5
4 4
‰Â“®‚R‚k
Ø6.0
“dü
Ø4.8
“dü
Ø3.2
ƒtƒ@ƒCƒn??
Ø3.2
ƒGƒA
Ø3.2
ƒtƒ@ƒCƒn??
Ø6.0
“dü
Ø6.0
“dü
‰Â“®‚R‚q
Ø6.0
“dü
Ø3.2
ƒtƒ@ƒCƒn??
Ø3.2
ƒGƒA
Ø3.2
ƒtƒ@ƒCƒn??
4 44 4 4 4
5 5
B4501
M46
B4502
B4801
M48
M52
B5101
M51
M47
M45
B1414,B1415
B1416,B1417
B4701
Symbol Name Symbol Name
M45 NL-LA1 B4501 Lane A Deceleration Sensor (L Flow),
M46 NL-LA2 STOP Sensor (R Flow)
M47 NA-LA1 B4502 Lane A Stop Sensor (L Flow)
M48 NA-LA2 B4701 Lane A Stop Sensor Mounting Section 1
M51 NR-LA1 B4801 Lane A Stop Sensor Mounting Section 2
M52 NR-LA2 B5101 Lane A Stop Sensor (L Flow),
Deceleration Sensor (R Flow)
B1414 PCB Stopper AL Upper Sensor
B1415 PCB Stopper AL Origin Sensor
B1416 PCB Stopper AR Upper Sensor
B1417 PCB Stopper AR Origin Sensor