5OM-1625-003_w.pdf - 第99页
5OM-1603 2-20 Sensor and Load Layout 1 102-001
5OM-1603
2-19
Sensor and Load Layout
1102-001
Upper Stage : Left View
Lower Stage : Right View
B0618
B0918
B0620
B0920
Y0636
Y0936
Y0635
Y0935
B0622
B0922
Symbol Name Symbol Name
Y0635 Nozzle Stocker 2 Shutter Open/Close 1 Y0935 Nozzle Stocker 1 Shutter Open/Close 1
Y0636 Multi Function Nozzle Stocker 2 Ascending 1 Y0936 Multi Function Nozzle Stocker 1 Ascending 1
B0618 Multi Function Nozzle Stocker 2
Unit Lower Limit Detection 1
B0918 Multi Function Nozzle Stocker 1
Unit Lower Limit Detection 1
B0620 Multi Function Nozzle Stocker 2
Shutter Close Check 1
B0920 Multi Function Nozzle Stocker 1
Shutter Close Check 1
B0622
Multi Function Nozzle Stocker 2 Clamp Check 1
B0922
Multi Function Nozzle Stocker 1 Clamp Check 1
Nozzle Stocker for Multi-Functional Nozzle Section Layout
5OM-1603
2-20
Sensor and Load Layout
1102-001
5OM-1603
0908-002 3-A
Chapter 3
Parts Location
This chapter describes the layout, etc., of each section.
As this contains highly sophisticated contents, it should carefully be
referred to.