KE-750_MS - 第3页
Contents Maintenance Manual Chapter 1 X-Y Unit 1. Timing Belt Replacement & Tension Adju stment ............................................................................ 1-4 2. Pulley R eplacem ent ...............…
1. Maintenance Manual
Contents
Maintenance Manual
Chapter 1 X-Y Unit
1. Timing Belt Replacement & Tension Adjustment............................................................................ 1-4
2. Pulley Replacement......................................................................................................................... 1-4
3. Servo Motor Replacement............................................................................................................... 1-8
4. Magnescale Replacement............................................................................................................... 1-10
5. Limit Sensor Replacement............................................................................................................... 1-10
6. Home Sensor Replacement............................................................................................................. 1-11
7. Cable Bearer Replacement ............................................................................................................. 1-11
Chapter 2 Head Unit
1. Head Unit Replacement & Subsequent Adjustment........................................................................ 1-13
2. Z Slider Shaft (IC) Assy Replacement............................................................................................. 1-22
3. Z-axis Motor Replacement............................................................................................................... 1-25
4. θ-axis Motor Replacement............................................................................................................... 1-26
5. Z-axis Deceleration Sensor Replacement....................................................................................... 1-28
6. Laser Sensor Replacement............................................................................................................. 1-29
7. Head Up Spring Replacement......................................................................................................... 1-31
8. Coupling θ Replacement.................................................................................................................. 1-31
9. Coupling Z Replacement ................................................................................................................. 1-32
10. IC Head Encoder Replacement....................................................................................................... 1-33
11. Spline Housing Assy Replacement.................................................................................................. 1-34
12. O-Ring Replacement ....................................................................................................................... 1-35
13. Summary of Readjustments Required after Replacement.............................................................. 1-36
Chapter 3 Head Periphery
1. Vacuum Switch Solenoid Replacement........................................................................................... 1-37
2. Blow Switch Solenoid Replacement................................................................................................ 1-38
3. Ejector Replacement........................................................................................................................ 1-39
4. Union Filter Replacement ................................................................................................................ 1-40
5. Pressure Sensor Replacement........................................................................................................ 1-41
6. Bad Mark Sensor Replacement....................................................................................................... 1-42
7. HMS Replacement (Optional).......................................................................................................... 1-45
8. Head PWB Replacement................................................................................................................. 1-49
9. Summary of Readjustments Required after Replacement.............................................................. 1-50
1-i
Chapter 4 OCC Unit
1. OCC Unit Replacement ................................................................................................................... 1-51
2. CCD Camera / Lens Replacement.................................................................................................. 1-53
3. OCC Light PWB Replacement......................................................................................................... 1-54
4. Polarizing Filter Replacement (Main OCC only).............................................................................. 1-56
5. Focus Adjustment............................................................................................................................ 1-58
6. OCC Light Emission Adjustment ..................................................................................................... 1-58
7. Summary of Readjustments Required after Replacement.............................................................. 1-58
Chapter 5 PWB Conveyor Unit
1. Conveyor Belt Replacement............................................................................................................ 1-59
2. Conveyor Pulley Replacement ........................................................................................................ 1-59
3. Conveyor Motor Replacement......................................................................................................... 1-60
4. PWB Detecting Sensor Replacement.............................................................................................. 1-61
5. BU Plate UP/DOWN Sensor Replacement ..................................................................................... 1-63
6. T. PIN Sensor Replacement............................................................................................................ 1-63
7. BU Cylinder Replacement ............................................................................................................... 1-64
8. Stopper Cylinder Replacement........................................................................................................ 1-65
9. Y Pusher Cylinder Replacement...................................................................................................... 1-65
10. X Pusher Cylinder Replacement...................................................................................................... 1-66
11. Pressure Reduction Valve Replacement......................................................................................... 1-66
12. SV Cable Assy Replacement........................................................................................................... 1-67
13. Centering Pin Replacement............................................................................................................. 1-67
14. Shock Absorber Replacement......................................................................................................... 1-68
15. Rail Plate Levelling .......................................................................................................................... 1-68
Chapter 6 CAL Block
1. CAL Light PWB Replacement.......................................................................................................... 1-69
2. Ejector Replacement........................................................................................................................ 1-71
3. CAL Vacuum ON Cable Replacement ............................................................................................ 1-72
4. Union Filter Replacement ................................................................................................................ 1-73
Chapter 7 ATC Unit
1. Air Cylinder Replacement.............................................................................................................. 1-74
2. ATC ON/OFF Verification Cable Replacement ............................................................................... 1-77
1-ii