KE-750_MS - 第77页
(5) Remove the 4 M3 SEMS cap screws holding the CAL block PWB and remove PWB. (6) To reassemble, follow steps (1)~(4) in reverse sequence. (7) Pull on the φ 4mm tube from below to remove slack inside the CAL side cover. …
Chapter 6 CAL Block
1. CAL Block PWB Replacement
(1) Unplug the 2 cables connected to the PWB.
(2) Disconnect θ6mm air tube from elbow union.
(3) Disconnect union filter from holder.
(4) Remove the 4 M3 SEMS cap screws and pull down CAL side cover. Reach into opening and
disconnect φ4mm tube from straight. Now CAL side cover can be removed.
Straight
PJ301040506
CAL plate
E3603721000
CAL block PWB ass
y
E86097210A0
Ejecto
r
E3066700000
Union filte
r
Holde
r
Silence
r
PX058001000
CAL vacuum ON
cable assy
E93677250A0
Elbow union
PJ304040505
Elbow union
PJ304040505
θ 6mm air tube
CAL side cove
r
E3604721000
M3 SEMS cap
CAL stand
E3602721000
θ 4mm air tube
Fig. 6-1-1
1-69
(5) Remove the 4 M3 SEMS cap screws holding the CAL block PWB and remove PWB.
(6) To reassemble, follow steps (1)~(4) in reverse sequence.
(7) Pull on the φ4mm tube from below to remove slack inside the CAL side cover.
CAL block PWB
(E86097210A0)
CAL side cove
r
(E3604721000)
M3 SEMS cap scre
w
Fig. 6-1-2
1-70
2. Ejector Replacement
(1) Repeat steps (1)~(4) in the previous section to remove CAL side cover.
(2) Remove the 2 M3 SEMS cap screws and replace ejector.
(3) To reassemble, follow steps (1)~(4) in the previous section in reverse sequence.
(4) Pull on the φ4mm tube from below to remove slack inside the CAL side cover.
M3 SEMS cap scre
w
Ejecto
r
Fig. 6-2-1
1-71