5M-1751-004w_G5S - 第100页

5OM-1751 1304-001 3-A Chapter 3 Parts Location This chapter describes the layout, etc., of each section. As this contains highly sophisticated contents, it should carefully be referred to.

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Sensor and Load Layout
5OM-1751
1305-002
B_DWN1
B_SH1
Y_UP1
Y_SH
B_CMP1
B1611
Symbol Name Symbol Name
Y_SH Nozzle Stocker 2 Shutter Open/Close 1
Y_UP1 Multi Function Nozzle Stocker 2 Ascending 1
B_DWN1 Multi Function Nozzle Stocker 2
Unit Lower Limit Detection 1
B_SH1 Multi Function Nozzle Stocker 2
Shutter Close Check 1
B_CMP1
Multi Function Nozzle Stocker 2 Clamp Check 1
B_1611
Multi Function Nozzle Stocker 2
Setup Error Detection
Nozzle Stocker for Multi-Functional Nozzle Section Layout
5OM-1751
1304-001 3-A
Chapter 3
Parts Location
This chapter describes the layout, etc., of each section.
As this contains highly sophisticated contents, it should carefully be
referred to.
5OM-1751
1304-001 3-B