5M-1751-004w_G5S - 第119页
3-18 Parts Location 5OM-1751 SIDE A 1305-002

3-17
Parts Location
5OM-1751
1305-002
Side View PCB Panel
U02
G9
Symbol Name Remarks
U02 Side View I/O PCB Model UC39
G9 Side View Camera Power Unit

3-18
Parts Location
5OM-1751
SIDE A
1305-002

3-19
Parts Location
5OM-1751
1305-002
Side Panel Front (Inside)
K10K28K29
Q205
Q206(30A)
Q221(30A)
TB:AC2
Symbol Name Remarks
Q205 CirCuit Protecter Vacuum pump
Q206 CirCuit Protecter
Q221 CirCuit Protecter
K29 EM-CONTACTOR Vacuum pump Power Suppry
K28 EM-CONTACTOR CPU Power Suppry
K10 EM-CONTACTOR G2 Power Suppry