5M-1751-004w_G5S - 第120页

3-19 Parts Location 5OM-1751 1305-002 Side Panel Front (Inside) K10 K28 K29 Q205 Q206(30A) Q221(30A) TB:AC2 Symbol Name Remarks Q205 CirCuit Protecter V acuum pump Q206 CirCuit Protecter Q221 CirCuit Protecter K29 EM-CON…

100%1 / 190
3-18
Parts Location
5OM-1751
SIDE A
1305-002
3-19
Parts Location
5OM-1751
1305-002
Side Panel Front (Inside)
K10K28K29
Q205
Q206(30A)
Q221(30A)
TB:AC2
Symbol Name Remarks
Q205 CirCuit Protecter Vacuum pump
Q206 CirCuit Protecter
Q221 CirCuit Protecter
K29 EM-CONTACTOR Vacuum pump Power Suppry
K28 EM-CONTACTOR CPU Power Suppry
K10 EM-CONTACTOR G2 Power Suppry
3-20
Parts Location
5OM-1751
1305-002
Side Panel Front (Outside)
TB : AC1
F200
Symbol Name Remarks
F200 Lightning Surge Protecter