00198829-01_SM_X-Series-S_Hxxxx_EN - 第115页
6 Gantries 6.3 X and Y axis Service Manual SIPLACE X-Series S (from Hxxxx) 01/2021 115 Fig.145: Operation of test device PG-U - 2 Fig.146: Operation of test device PG-U - 3

6 Gantries
6.3 X and Y axis
114 Service Manual SIPLACE X-Series S (from Hxxxx) 01/2021
Fig.143: Operation of test device PG1-I - 3
Test device PG-U [03071361‑xx]
Fig.144: Operation of test device PG-U - 1

6 Gantries
6.3 X and Y axis
Service Manual SIPLACE X-Series S (from Hxxxx) 01/2021 115
Fig.145: Operation of test device PG-U - 2
Fig.146: Operation of test device PG-U - 3

6 Gantries
6.3 X and Y axis
116 Service Manual SIPLACE X-Series S (from Hxxxx) 01/2021
Fig.147: Operation of test device PG-U - 4