NXT-0167 - 第16页

Module Nicknam e Module Serial Number Head Nicknam e Head Serial Number M3 M3XNo5286 H12S 00375 1 No Holder Side Degree X [um ] Y [um] 1 0 0 0 -10.6572 13.15009 6 2 1 0 0 -17.598965 13.77296 3 2 0 0 -18.365367 16.937314 …

100%1 / 27
344
7
0
0
2.263898
-8.856359
345
8
0
0
-10.349418
-2.514265
346
9
0
0
-8.115811
-6.535314
347
10
0
0
-10.280705
9.889659
348
11
0
0
3.754564
13.937027
349
0
0
90
-2.171178
3.136671
350
1
0
90
-6.45034
8.293828
351
2
0
90
-8.288341
3.160562
352
3
0
90
-8.778264
2.463307
353
4
0
90
-3.230066
-12.454419
354
5
0
90
-5.588489
-12.666104
355
6
0
90
-6.963803
7.22183
356
7
0
90
-5.951057
-1.218458
357
8
0
90
-9.248356
-4.806131
358
9
0
90
-9.358087
-1.934569
359
10
0
90
-4.035426
-18.362353
360
11
0
90
-14.882704
9.376294
361
0
0
180
9.685752
-7.526091
362
1
0
180
9.208354
10.29975
363
2
0
180
15.101057
-9.83374
364
3
0
180
-10.854356
5.189091
365
4
0
180
-12.055175
-7.287525
366
5
0
180
-13.264346
11.437535
367
6
0
180
-6.726423
-5.207834
368
7
0
180
0.756969
3.622975
369
8
0
180
-11.850803
-8.968885
370
9
0
180
-7.382109
1.074584
371
10
0
180
-15.871547
11.213237
372
11
0
180
-1.945546
5.669352
373
0
0
270
9.73511
-8.382672
374
1
0
270
8.083658
-17.949313
375
2
0
270
-3.00585
5.619866
376
3
0
270
-10.014207
5.713407
377
4
0
270
-13.045448
-1.581783
378
5
0
270
-4.775099
-1.955847
379
6
0
270
-11.4373
-0.743305
380
7
0
270
-7.292608
-6.899976
381
8
0
270
-1.54999
-2.58711
382
9
0
270
-8.070868
-1.942335
383
10
0
270
-10.08018
7.687183
384
11
0
270
-15.889195
2.129295
-5.63
-1.13
8.56
8.82
50
50
-50
-50
1.95
1.89
1.73
1.85
Form# 12-ME80-0GEN-0229-01-WI-D
Cpk
Average
STDEV
USL
LSL
CP
M02
Module
Nickname
Module Serial
Number
Head
Nickname
Head Serial
Number
M3 M3XNo5286 H12S 003751
No
Holder
Side
Degree
X [um]
Y [um]
1
0
0
0
-10.6572
13.150096
2
1
0
0
-17.598965
13.77296
3
2
0
0
-18.365367
16.937314
4
3
0
0
-19.506695
15.683102
5
4
0
0
-12.267717
15.799346
6
5
0
0
-13.415284
12.77809
7
6
0
0
2.899908
17.678763
8
7
0
0
-3.627018
11.871458
9
8
0
0
1.426749
6.711692
10
9
0
0
4.224285
-4.227352
11
10
0
0
5.580024
-15.325053
12
11
0
0
-10.88742
-4.334326
13
0
0
90
-14.233011
4.570372
14
1
0
90
-13.959475
8.534938
15
2
0
90
-1.424648
0.609775
16
3
0
90
-12.353529
10.903838
17
4
0
90
-12.209888
-1.642762
18
5
0
90
-12.62364
12.886025
19
6
0
90
-11.786373
-4.477906
20
7
0
90
-11.868259
7.663144
21
8
0
90
8.523478
-1.193526
22
9
0
90
2.320028
-5.67637
23
10
0
90
11.328173
-18.958969
24
11
0
90
-11.821581
-10.352472
25
0
0
180
-3.050496
-6.862954
26
1
0
180
-12.012563
-17.582749
27
2
0
180
-10.489141
-14.985214
28
3
0
180
-11.303135
-8.925053
29
4
0
180
-15.083519
2.385659
30
5
0
180
-13.765734
0.877406
31
6
0
180
-14.362171
6.433632
32
7
0
180
-12.902242
12.713927
33
8
0
180
-12.842587
16.126285
34
9
0
180
-5.046453
3.395303
35
10
0
180
0.697737
-16.885703
36
11
0
180
-0.838758
10.662707
37
0
0
270
-2.174239
-2.603266
38
1
0
270
-0.328709
-9.271865
39
2
0
270
-1.202491
-14.66124
40
3
0
270
-12.630258
-10.535981
41
4
0
270
-11.886368
1.550465
42
5
0
270
-10.006771
7.789855
43
6
0
270
-11.783455
15.843204
44
7
0
270
-15.633839
17.71218
45
8
0
270
-1.462361
17.090664
46
9
0
270
-10.721425
19.103203
47
10
0
270
0.48739
17.651548
48
11
0
270
-1.684531
9.235885
49
0
0
0
-2.924859
-5.725591
50
1
0
0
-8.165299
-4.725176
51
2
0
0
-12.188311
-9.835604
52
3
0
0
-1.878246
-5.10864
53
4
0
0
-12.459918
8.924763
M03
54
5
0
0
-15.446562
12.478886
55
6
0
0
-15.252958
10.490375
56
7
0
0
-1.987188
19.260769
57
8
0
0
-12.956599
14.275656
58
9
0
0
-7.901347
11.009866
59
10
0
0
6.230771
8.852415
60
11
0
0
-3.990892
11.881094
61
0
0
90
-17.536406
15.953857
62
1
0
90
-11.152182
10.944837
63
2
0
90
-15.881703
14.089075
64
3
0
90
-18.512372
8.114111
65
4
0
90
-4.712194
1.714231
66
5
0
90
-8.762337
3.230124
67
6
0
90
-1.513944
-4.422151
68
7
0
90
-12.037289
8.105346
69
8
0
90
-6.746674
10.357014
70
9
0
90
-5.091655
5.808139
71
10
0
90
-1.564941
2.988169
72
11
0
90
-11.765597
10.957483
73
0
0
180
-4.833003
1.196735
74
1
0
180
-15.510725
4.562653
75
2
0
180
-5.493384
6.978797
76
3
0
180
-12.634802
15.845712
77
4
0
180
-8.655424
9.633863
78
5
0
180
-16.610699
5.495323
79
6
0
180
-11.710569
-3.919615
80
7
0
180
-7.916516
18.058988
81
8
0
180
-1.117481
13.130751
82
9
0
180
-9.458118
2.324918
83
10
0
180
0.744407
-0.46076
84
11
0
180
-17.625523
19.876485
85
0
0
270
-14.156411
17.984628
86
1
0
270
-8.692666
16.847102
87
2
0
270
-12.365678
11.984679
88
3
0
270
-9.199048
21.530241
89
4
0
270
-7.272334
7.25924
90
5
0
270
-6.246226
6.124027
91
6
0
270
-4.344066
-2.39863
92
7
0
270
-1.242689
-11.534802
93
8
0
270
-9.878229
-3.840625
94
9
0
270
-1.44616
-3.555658
95
10
0
270
-5.351461
-2.266933
96
11
0
270
-10.474066
-0.582955
97
0
0
0
4.629602
11.119447
98
1
0
0
15.764319
15.907359
99
2
0
0
-10.908789
6.505129
100
3
0
0
-2.777751
5.668096
101
4
0
0
-0.336545
3.858048
102
5
0
0
-4.188632
-8.405327
103
6
0
0
-5.31158
-7.070422
104
7
0
0
-16.438507
-4.748273
105
8
0
0
-14.48847
-7.793983
106
9
0
0
-12.762283
6.754205
107
10
0
0
-17.873415
-4.343261
108
11
0
0
-17.4215
17.846015
109
0
0
90
1.757164
-0.963109
110
1
0
90
-12.567858
-9.640458
111
2
0
90
-17.547406
-4.790817
M03