NXT-0167 - 第3页
54 5 0 0 11.346248 -2.645768 55 6 0 0 14.649022 2.586537 56 7 0 0 16.101884 0.063889 57 8 0 0 17.597424 -6.118726 58 9 0 0 11.613552 2.138478 59 10 0 0 8.476836 9.636283 60 11 0 0 15.117358 5.106395 61 0 0 90 12.701973 1…
Module
Nickname
Module Serial
Number
Head
Nickname
Head Serial
Number
M3 M3XNo6332 H12S 002209
No
Holder
Side
Degree
X [um]
Y [um]
1
0
0
0
13.022564
6.403117
2
1
0
0
18.060626
8.741863
3
2
0
0
14.850993
-8.535581
4
3
0
0
15.547313
2.199175
5
4
0
0
10.209685
-20.743314
6
5
0
0
16.778964
-13.475839
7
6
0
0
19.100702
3.179119
8
7
0
0
10.550934
7.994121
9
8
0
0
-17.2122
7.334775
10
9
0
0
10.347667
-2.933088
11
10
0
0
15.259152
-4.064208
12
11
0
0
11.942064
7.300957
13
0
0
90
10.753882
-15.342025
14
1
0
90
9.460166
8.895398
15
2
0
90
13.921678
4.724947
16
3
0
90
16.105685
4.728778
17
4
0
90
19.048703
6.3535
18
5
0
90
17.152275
11.228401
19
6
0
90
12.461037
-1.363869
20
7
0
90
14.088186
-7.480744
21
8
0
90
10.963722
-3.180963
22
9
0
90
14.667269
6.796305
23
10
0
90
12.26968
2.147326
24
11
0
90
14.614707
0.487729
25
0
0
180
11.087561
-1.640771
26
1
0
180
10.776008
1.082056
27
2
0
180
14.115402
10.641703
28
3
0
180
14.420124
2.042351
29
4
0
180
16.727563
4.553544
30
5
0
180
15.431994
5.73641
31
6
0
180
17.559621
7.977505
32
7
0
180
14.155289
-13.205499
33
8
0
180
13.784413
6.171943
34
9
0
180
13.401668
-4.736853
35
10
0
180
15.493494
-6.302269
36
11
0
180
13.201906
9.229567
37
0
0
270
13.577767
9.407424
38
1
0
270
18.904649
-3.364452
39
2
0
270
18.49185
6.686668
40
3
0
270
10.415099
1.887156
41
4
0
270
11.278855
-3.544459
42
5
0
270
11.828574
-11.059745
43
6
0
270
17.984345
4.381327
44
7
0
270
12.38879
4.470766
45
8
0
270
16.268282
5.364718
46
9
0
270
14.655102
-0.410953
47
10
0
270
11.0516
3.49702
48
11
0
270
11.255526
2.491499
49
0
0
0
14.371075
3.531274
50
1
0
0
13.904917
3.270134
51
2
0
0
11.944329
-2.979074
52
3
0
0
18.071794
4.034731
53
4
0
0
14.288759
14.511124
M01
54
5
0
0
11.346248
-2.645768
55
6
0
0
14.649022
2.586537
56
7
0
0
16.101884
0.063889
57
8
0
0
17.597424
-6.118726
58
9
0
0
11.613552
2.138478
59
10
0
0
8.476836
9.636283
60
11
0
0
15.117358
5.106395
61
0
0
90
12.701973
10.220204
62
1
0
90
11.634005
3.927104
63
2
0
90
12.77179
-2.171278
64
3
0
90
19.980375
8.374911
65
4
0
90
16.712868
-3.934834
66
5
0
90
16.945583
7.871428
67
6
0
90
10.119065
3.31695
68
7
0
90
9.27393
-14.161114
69
8
0
90
12.377228
11.704329
70
9
0
90
18.352432
5.539624
71
10
0
90
12.638021
-0.641574
72
11
0
90
18.795304
5.66348
73
0
0
180
11.125483
0.094285
74
1
0
180
16.129584
-4.383611
75
2
0
180
17.834114
3.050273
76
3
0
180
13.771029
-3.086193
77
4
0
180
14.214457
-2.371125
78
5
0
180
16.489574
-2.1233
79
6
0
180
15.188646
2.498419
80
7
0
180
10.067504
-6.125022
81
8
0
180
13.653724
-11.015899
82
9
0
180
19.11773
1.398506
83
10
0
180
11.395392
-12.550203
84
11
0
180
16.451504
0.725234
85
0
0
270
17.096112
-14.951561
86
1
0
270
6.211907
-2.241357
87
2
0
270
11.236457
4.886831
88
3
0
270
13.659481
-1.333516
89
4
0
270
8.90331
-6.688301
90
5
0
270
18.161147
-0.14722
91
6
0
270
18.789906
-8.433953
92
7
0
270
16.103283
-10.869928
93
8
0
270
17.605219
1.05174
94
9
0
270
13.235109
-3.313457
95
10
0
270
11.366531
14.296035
96
11
0
270
14.218434
2.160186
97
0
0
0
6.151514
3.675092
98
1
0
0
7.77472
6.315023
99
2
0
0
8.7263
7.747182
100
3
0
0
12.254547
13.657156
101
4
0
0
18.220038
6.99275
102
5
0
0
15.343938
6.751647
103
6
0
0
12.60862
4.965736
104
7
0
0
19.246705
-6.464195
105
8
0
0
18.172347
-11.011803
106
9
0
0
13.663373
-7.403084
107
10
0
0
19.888224
-16.648391
108
11
0
0
12.040925
-6.496573
109
0
0
90
12.307745
-2.910405
110
1
0
90
10.937649
8.587186
111
2
0
90
11.175985
0.80857
M01
112
3
0
90
18.798394
2.666211
113
4
0
90
15.425937
-2.497455
114
5
0
90
12.051168
7.379777
115
6
0
90
19.279559
5.887312
116
7
0
90
7.780405
-4.84907
117
8
0
90
11.199359
5.292837
118
9
0
90
11.505133
10.370305
119
10
0
90
6.246713
1.153357
120
11
0
90
11.841714
2.513689
121
0
0
180
10.600467
3.906012
122
1
0
180
18.842376
5.114671
123
2
0
180
13.364749
5.2629
124
3
0
180
13.662298
-9.515687
125
4
0
180
15.264632
1.039225
126
5
0
180
7.172577
2.635748
127
6
0
180
3.775833
0.201381
128
7
0
180
1.384033
4.664083
129
8
0
180
11.073987
0.823553
130
9
0
180
13.935244
4.050543
131
10
0
180
13.002427
-10.521453
132
11
0
180
10.8509
6.416981
133
0
0
270
17.341367
8.087687
134
1
0
270
12.374433
-3.968029
135
2
0
270
15.210887
0.262662
136
3
0
270
17.030699
11.036261
137
4
0
270
9.346731
-1.467758
138
5
0
270
0.050975
-2.210693
139
6
0
270
16.842648
-1.884745
140
7
0
270
14.048724
11.895937
141
8
0
270
16.291145
-2.522733
142
9
0
270
15.21694
3.639711
143
10
0
270
13.664922
16.227669
144
11
0
270
19.004108
7.803841
145
0
0
0
12.373716
5.323024
146
1
0
0
13.380942
4.47174
147
2
0
0
5.149567
2.953361
148
3
0
0
11.274273
5.002279
149
4
0
0
16.624648
7.317762
150
5
0
0
5.833907
6.996062
151
6
0
0
14.64033
-2.447053
152
7
0
0
5.987923
10.635287
153
8
0
0
15.373419
-3.398765
154
9
0
0
10.002494
1.821246
155
10
0
0
12.881572
1.16449
156
11
0
0
19.482781
6.182962
157
0
0
90
7.310317
13.491138
158
1
0
90
7.268585
2.241696
159
2
0
90
8.092922
-2.478436
160
3
0
90
10.17793
-2.620393
161
4
0
90
6.447117
3.736942
162
5
0
90
18.182308
1.76433
163
6
0
90
15.416923
7.910425
164
7
0
90
2.282769
0.122344
165
8
0
90
20.275013
15.272177
166
9
0
90
16.170364
7.927151
167
10
0
90
8.274068
3.314278
168
11
0
90
11.141173
2.908973
169
0
0
180
18.642927
5.826984
M01