NXT-0167 - 第9页
Module Nicknam e Module Serial Number Head Nicknam e Head Serial Number M3 M3XNo6332 H12S 00517 4 No Holder Side Degree X [um ] Y [um] 1 0 0 0 -2.949575 2.34761 5 2 1 0 0 9.88109 5.286655 3 2 0 0 4.699287 19.744561 4 3 0…
344
7
0
0
8.071099
7.630752
345
8
0
0
11.844786
-12.477907
346
9
0
0
12.566445
-9.877133
347
10
0
0
15.306082
9.514213
348
11
0
0
13.384885
-2.844715
349
0
0
90
10.823912
9.08401
350
1
0
90
14.623821
0.141153
351
2
0
90
15.50886
-2.774736
352
3
0
90
10.660564
4.352104
353
4
0
90
13.926281
2.28952
354
5
0
90
5.16147
-1.713871
355
6
0
90
17.607079
8.988609
356
7
0
90
13.592608
-7.888063
357
8
0
90
10.288556
9.854012
358
9
0
90
13.709992
-4.766255
359
10
0
90
-0.272841
-8.959162
360
11
0
90
16.463064
3.329265
361
0
0
180
11.486278
-0.680085
362
1
0
180
13.062303
-7.689289
363
2
0
180
13.188867
5.492386
364
3
0
180
8.386818
-2.614705
365
4
0
180
14.036291
3.930142
366
5
0
180
1.385566
-4.395287
367
6
0
180
16.368926
2.142763
368
7
0
180
19.771703
-11.240539
369
8
0
180
11.570639
-9.571963
370
9
0
180
19.314388
6.993875
371
10
0
180
8.146016
22.295836
372
11
0
180
18.750399
4.693021
373
0
0
270
16.41024
-9.65368
374
1
0
270
18.780645
-13.730516
375
2
0
270
11.131866
2.637368
376
3
0
270
21.867896
5.246601
377
4
0
270
13.595358
5.098231
378
5
0
270
7.454478
-10.523589
379
6
0
270
19.654628
-7.106729
380
7
0
270
10.560393
0.93054
381
8
0
270
17.677943
15.509747
382
9
0
270
8.538746
-3.360615
383
10
0
270
17.665643
23.126778
384
11
0
270
14.223327
3.575034
12.61
0.50
5.10
7.01
50
50
-50
-50
3.27
2.38
2.44
2.35
Form# 12-ME80-0GEN-0229-01-WI-D
Cpk
Average
STDEV
USL
LSL
CP
M01
Module
Nickname
Module Serial
Number
Head
Nickname
Head Serial
Number
M3 M3XNo6332 H12S 005174
No
Holder
Side
Degree
X [um]
Y [um]
1
0
0
0
-2.949575
2.347615
2
1
0
0
9.88109
5.286655
3
2
0
0
4.699287
19.744561
4
3
0
0
1.114535
21.226442
5
4
0
0
-11.600144
3.689652
6
5
0
0
7.94997
-7.389839
7
6
0
0
0.328021
-3.331287
8
7
0
0
-4.995148
-12.826131
9
8
0
0
11.004462
-1.210975
10
9
0
0
-15.555244
-8.476884
11
10
0
0
-8.183625
-6.621913
12
11
0
0
-10.471149
8.829065
13
0
0
90
-10.118735
-0.056217
14
1
0
90
-8.306052
-1.42703
15
2
0
90
-13.290868
2.93945
16
3
0
90
-17.049974
5.94132
17
4
0
90
-17.246811
14.657767
18
5
0
90
-11.666171
-6.9397
19
6
0
90
-8.661741
5.737775
20
7
0
90
-11.722238
8.479874
21
8
0
90
-13.528303
0.233135
22
9
0
90
-3.125333
0.985389
23
10
0
90
-11.156351
3.34675
24
11
0
90
-2.143965
1.618954
25
0
0
180
6.87745
17.517222
26
1
0
180
-18.034147
2.2651
27
2
0
180
10.51202
-4.99252
28
3
0
180
4.321297
-0.952432
29
4
0
180
-3.294135
-4.714284
30
5
0
180
-12.332556
7.179328
31
6
0
180
-8.353305
-3.418697
32
7
0
180
-11.509263
-0.664421
33
8
0
180
-18.575625
-16.621344
34
9
0
180
-13.148289
-10.42123
35
10
0
180
-14.348109
1.877026
36
11
0
180
1.583641
-9.54414
37
0
0
270
4.719887
2.221399
38
1
0
270
-7.485178
4.038375
39
2
0
270
-6.076219
11.954094
40
3
0
270
-12.402361
-17.340619
41
4
0
270
-10.712022
-2.044406
42
5
0
270
-5.924508
-10.62693
43
6
0
270
-8.891278
-5.130292
44
7
0
270
-10.922337
16.644857
45
8
0
270
-15.963534
1.627611
46
9
0
270
-6.183645
-0.425058
47
10
0
270
3.959187
-4.911275
48
11
0
270
-5.917271
-3.19648
49
0
0
0
7.270031
5.218065
50
1
0
0
4.75752
15.986793
51
2
0
0
7.977533
4.266824
52
3
0
0
-12.956493
-4.479765
53
4
0
0
0.229879
2.514807
M02
54
5
0
0
-14.13367
0.839516
55
6
0
0
-4.643952
7.07778
56
7
0
0
2.73345
-5.623326
57
8
0
0
-11.595167
1.316292
58
9
0
0
-8.454592
2.353274
59
10
0
0
-18.252135
17.062258
60
11
0
0
8.637285
4.231785
61
0
0
90
0.498951
7.75279
62
1
0
90
-4.321336
-11.741833
63
2
0
90
-8.731201
-2.199053
64
3
0
90
-0.820838
-0.342819
65
4
0
90
-2.499871
-8.477231
66
5
0
90
4.232535
-10.869436
67
6
0
90
5.204548
-14.452995
68
7
0
90
-5.684022
-1.437686
69
8
0
90
-8.667359
-5.229303
70
9
0
90
-3.306808
2.442077
71
10
0
90
1.581725
-11.680333
72
11
0
90
5.325574
9.265856
73
0
0
180
11.307883
-4.350691
74
1
0
180
-3.960379
5.636105
75
2
0
180
-19.894549
10.687854
76
3
0
180
4.213171
6.350218
77
4
0
180
-16.539596
5.658073
78
5
0
180
-19.272447
0.522873
79
6
0
180
-16.660231
3.243025
80
7
0
180
-8.604147
2.99729
81
8
0
180
-0.940763
-15.710023
82
9
0
180
-8.590852
3.330584
83
10
0
180
-5.506134
-5.073341
84
11
0
180
-12.392612
19.618976
85
0
0
270
19.434474
-12.616253
86
1
0
270
4.107755
-0.230968
87
2
0
270
-14.793053
-12.4358
88
3
0
270
-8.391789
6.814612
89
4
0
270
-9.404783
-1.205402
90
5
0
270
-2.69531
1.923966
91
6
0
270
-6.560982
-6.23104
92
7
0
270
-8.107555
-11.124425
93
8
0
270
-12.920258
-3.822325
94
9
0
270
-4.716111
-2.487596
95
10
0
270
-11.599193
5.488526
96
11
0
270
1.473161
2.299988
97
0
0
0
10.601357
-18.536399
98
1
0
0
14.716188
-4.540619
99
2
0
0
9.034269
1.645385
100
3
0
0
3.197248
4.388003
101
4
0
0
-0.429918
-2.308578
102
5
0
0
-12.781304
-5.758278
103
6
0
0
-13.95107
-1.003414
104
7
0
0
0.054195
-11.314581
105
8
0
0
-18.744978
8.176341
106
9
0
0
-7.468717
7.090223
107
10
0
0
3.604766
0.618763
108
11
0
0
-5.464638
19.339931
109
0
0
90
-1.887503
-8.083631
110
1
0
90
-4.951108
-17.033467
111
2
0
90
1.215985
-9.361858
M02