444CEMM2(CM201).pdf - 第47页
Page 3-7 3 SOLUTIONS FOR ERROR 3 3 444C-E-MMA03-A02-02 3-2-1 Air Pressure Drop 1. Adjust the air pressure. When proper air pressure (0.49 MPa to 0.78 MPa) is not supplied, adjust the pressure to the specified one in the …

Page 3-6
444C-E-MMA03-A01-03
Error Messages
444C-422TE
segassemrorrE .oNO/I sesuaC snoitulosdnakcehC
-efeR
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noitomsixa-X
)edistnorf(etelpmocni
-
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θ
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/-Z/-Y/-XehT)2
θ
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.tifosumrofni,sraepparorrenafidna
-
noitomsixa-X
)edisraer(etelpmocni
noitomsixa-Y
)edistnorf(etelpmocni
noitomsixa-Y
)edisraer(etelpmocni
noitomsixa-Z
)edistnorf(etelpmocni
noitomsixa-Z
)edisraer(etelpmocni
θ
noitomsixa-
)edistnorf(etelpmocni
θ
noitomsixa-
)edisraer(etelpmocni
retemaraptfossixa-X
)edistnorf(rorre
-
/-XehtrofretemaraptfosehtotteseraatadgnorW)1
/-Z/-Y
θ
.tnemevomsixa-
ehtfidna,neercsrorreehttarorrefostnetnocehtkcehC)1
,retemarapenihcamehtroatadnoitcudorpehtnisirorre
.tifosumrofninehT.titcerroc
-
retemaraptfossixa-X
)edisraer(rorre
retemaraptfossixa-Y
)edistnorf(rorre
retemaraptfossixa-Y
)edisraer(rorre
retemaraptfossixa-Z
)edistnorf(rorre
retemaraptfossixa-Z
)edisraer(rorre
θ
retemaraptfossixa-
)edistnorf(rorre
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.tirevocerdna”,tnemtsujdAenihcaM“fo
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)edistnorf(
351:B921:A)2
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-
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451:B031:A)2
taolfepaT)edistnorf(
002:B65:A)3
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5-2-3
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-
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6-2-3
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Page 3-7
3
SOLUTIONS FOR ERROR
3
3
444C-E-MMA03-A02-02
3-2-1 Air Pressure Drop
1. Adjust the air pressure.
When proper air pressure (0.49 MPa to 0.78 MPa) is not supplied, adjust the pressure to the
specified one in the following procedures.
2. Set the air pressure detection value.
When the pressure is not set to the specified air pressure (0.4 MPa ), set it to the specified air
pressure detection value in the following way.
Pressure gauge
1
Unlock
2
Adjust
3
Lock
Valve
Adjustment
Air pressure adjustment
Air pressure adjustment
4U4C-AA00
444C-402P
3Y3C-089P
3-2 Check and Solutions
Front side of the main body

Page 3-8
444C-E-MMA03-A02-01
3-2-2 Vacuum Pump Thermal Error
Power Box Over Heat
1. Ensure that the cooling fan is working.
Carry out the output check. If the wind does not come out of the opening of the cooling fan, it may
have trouble. Inform us of exchanging the cooling fan.
2. Set the protection current value for the thermal relay. (for vacuum pump
thermal error)
Set the protection current value for the thermal relay in the power box to 2.4 A.
After setting it, press the thermal relay to reset.
Check and Solutions
Rear side of the main body (Left: B stage, right : A stage)
Rear side of the main body
Reset switch
Protection current setting value
4U4C-AB00
4U4C-AB00
444C-451E
∗ A stage only for 201
Opening of the cooling fan
(with cover)
Thermal relay
(without cover)
B stage
A stage