5OM-1286-007_w - 第74页
3-A AJQEPED-ID 0606-005 Chapter 3 Parts Location This chapter describes the layout, etc., of each section. As this contains highly sophisticated contents, it should carefully be referred to.
2-12
AJQEPED-ID
Layout of Sensors and Loads Nozzle Stockers
0606-005
Layout of Sensors and Loads Nozzle Stockers
Symbol Name Symbol Name
-B0918 Nozzle Stocker Lower Limit Detection 1
-B0920 Nozzle Stocker Shutter Open Check 1
-B0922 Nozzle Stocker Clamp Check 1
-Y0935 Nozzle Stocker Shutter Open
-Y0936 Nozzle Stocker
Ascending 1
3-A
AJQEPED-ID
0606-005
Chapter 3
Parts Location
This chapter describes the layout, etc., of each section.
As this contains highly sophisticated contents, it should
carefully be referred to.
3-B
AJQEPED-ID
0606-005