150452676

FlexTRAK TM -CD Plasma System Comp act De sign St rip Pr oces sing Features and Ben efits  Highly un iform plasma treatment with fast th roughput rat es  Produc tion - ready strip handl ing system  Easy to use to uch …

FlexTRAK

-CD Plasma System

Compact Design Strip Processing

Features and Benefits

 Highly uniform plasma treatment with

fast throughput rates

 Production-ready strip handling system

 Easy to use touch screen graphical user

interface (GUI)

 Service components accessible via

front pull-out shelves

 High volume, small footprint and low

cost of ownership

Superior Plasma Processing, Small

Footprint, High-Throughput

The FlexTRAK-CD plasma system is designed for

high throughput processing of lead frame strips,

laminated substrates, and other strip-type electronic

components, up to 5 strips per plasma cycle.

The patented plasma chamber design provides high

uniformity and process repeatability. It ensures all

areas of the substrate are treated uniformly, while

tight control over process parameters provides highly

repeatable results.

The system accommodates a wide range of strip sizes,

yielding unmatched production flexibility. Its small

chamber volume and proprietary process control

system provide short cycle times, with high machine

autonomy.

Applications

Plasma for pre-die attach, pre-wire bond, pre-mold

encapsulation and pre-underfill such as:

Contamination Removal & Surface Cleaning

• Fluorine & other halogens

• Metals & metal oxides

• Organic compounds

Etching and Surface Roughening

• Improve die adhesion & wire bonding

• Improve mold adhesion & reduce

delamination

Surface Activation

• Improve die adhesive flow, eliminate voids

and enhance adhesion

• Improve mold material flow, eliminate voids

and reduce wire sweep

• Improve underfill flow, eliminate voids,

enhance adhesion, and increase wicking

speed

Specifications: FlexTRAK™-CD

Strip Width Size (mm)

Number of Strips

Units per Hour (UPH)*

25.0 to 54.4

576

54.5 to 69.8

461

69.9 to 95.5

346

95.6 to 146.9

230

147.0 to 305.0

115

* Machine capable rates; for other strip width sizes, contact Nordson MARCH

Enclosure

Dimensions

W x D x H – Footprint

1068 W x 1166 D x 1600 H; 1966 H mm with Light Tower

(42 W x 46 D x 63 H; 77 H in. with Light Tower

Net Weight

430 kg (948 lbs)

Effective Footprint – Clearances

Right, Left, Back – 254 mm (10 in.), Front – 940 mm (37 in.)

Electrodes

Configurable

Powered, Ground or Floating

RF Power

Standard Wattage

600 W

Frequency

13.56 MHz

Gas Control

Maximum Number of MFCs

Control &

Interface

Software Control

PLC Control with PC-Based Touch Screen Interface

Remote Interface

SMEMA, SECS/GEM

Vacuum

Pump

Configurable

Internal or External Dry Pump

External Wet Pump

Facilities

Power Supply

220VAC, 20 A, 50/60Hz, Single Phase, 12 AWG, 3-Wire

Process Gas Fitting Size & Type

.25-in. OD Swagelok Tube

Process Gas Purity

Industrial grade or better

Process Gas Pressure

Regulated from .69 bar (10 psig) min. to 1 bar (15 psig) max.

Purge Gas Fitting Size & Type

.25-in. OD Swagelok Tube

Purge Gas Purity

Industrial grade Nitrogen or CDA

Purge Gas Pressure

Regulated from 2 bar (30 psig) min. to 5.5 bar (80 psig) max.

Pneumatic Valves Fitting Size &

Type

.25-in. OD Swagelok Tube

Pneumatic Gas Purity

CDA, Oil Free, Dewpoint <=7°C /45°F, Particulate Size <5

micron

Pneumatic Gas Pressure

Regulated from 3.4 bar (50 psig) min. to 5.5 bar (80 psig) max.

Exhaust

25.4mm (1 in.) OD Pipe Flange

Compliance

SEMI

S2/S8 (EH&S/Ergonomics)

International

CE Marked

Ancillary

Equipment

Gas Generators

Nitrogen, Hydrogen(Requires Additional Non-Optional

Hardware)

Facilities

Chiller, Scrubber

Shipping

Crate Dimensions

1550W x 1372L x 1804H mm (61W x 54L x 71H in.)

Gross Weight

590kg (1301lbs)

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Dimensions: FlexTRAK™-CD Plasma System

Front view of FlexTRAK-CD

Side view of FlexTRAK-CD w/doors open

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