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Dimen sions: FlexTRA K ™- CD Plasma System Front v ie w of Fl exTR AK - CD Side v iew of Fl exT RAK - C D w/ d oors o pen Page 3 of 4
Specifications: FlexTRAK™-CD
Strip Width Size (mm)
Number of Strips
Units per Hour (UPH)*
25.0 to 54.4
5
576
54.5 to 69.8
4
461
69.9 to 95.5
3
346
95.6 to 146.9
2
230
147.0 to 305.0
1
115
* Machine capable rates; for other strip width sizes, contact Nordson MARCH
Enclosure
Dimensions
W x D x H – Footprint
1068 W x 1166 D x 1600 H; 1966 H mm with Light Tower
(42 W x 46 D x 63 H; 77 H in. with Light Tower
Net Weight
430 kg (948 lbs)
Effective Footprint – Clearances
Right, Left, Back – 254 mm (10 in.), Front – 940 mm (37 in.)
Electrodes
Configurable
Powered, Ground or Floating
RF Power
Standard Wattage
600 W
Frequency
13.56 MHz
Gas Control
Maximum Number of MFCs
4
Control &
Interface
Software Control
PLC Control with PC-Based Touch Screen Interface
Remote Interface
SMEMA, SECS/GEM
Vacuum
Pump
Configurable
Internal or External Dry Pump
External Wet Pump
Facilities
Power Supply
220VAC, 20 A, 50/60Hz, Single Phase, 12 AWG, 3-Wire
Process Gas Fitting Size & Type
.25-in. OD Swagelok Tube
Process Gas Purity
Industrial grade or better
Process Gas Pressure
Regulated from .69 bar (10 psig) min. to 1 bar (15 psig) max.
Purge Gas Fitting Size & Type
.25-in. OD Swagelok Tube
Purge Gas Purity
Industrial grade Nitrogen or CDA
Purge Gas Pressure
Regulated from 2 bar (30 psig) min. to 5.5 bar (80 psig) max.
Pneumatic Valves Fitting Size &
Type
.25-in. OD Swagelok Tube
Pneumatic Gas Purity
CDA, Oil Free, Dewpoint <=7°C /45°F, Particulate Size <5
micron
Pneumatic Gas Pressure
Regulated from 3.4 bar (50 psig) min. to 5.5 bar (80 psig) max.
Exhaust
25.4mm (1 in.) OD Pipe Flange
Compliance
SEMI
S2/S8 (EH&S/Ergonomics)
International
CE Marked
Ancillary
Equipment
Gas Generators
Nitrogen, Hydrogen(Requires Additional Non-Optional
Hardware)
Facilities
Chiller, Scrubber
Shipping
Crate Dimensions
1550W x 1372L x 1804H mm (61W x 54L x 71H in.)
Gross Weight
590kg (1301lbs)
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Dimensions: FlexTRAK™-CD Plasma System
Front view of FlexTRAK-CD
Side view of FlexTRAK-CD w/doors open
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Nordson MARCH
+1.800.326.1151
Phone
info@nordsonmarch.com Email
2470-A Bates Avenue
Concord, CA, 94520-1122 U.S.A.
www.nordsonmarch.com
Published 2014-03-17
For more information,
speak with your local
representative or
contact your regional
office.
nordsonmarch.com
North America
Headquarters
Concord, CA, USA
+1.925.827.1240
info@nordsonmarch.com
China
Shanghai
+8621.3866.9166
Europe & Africa
Maastricht, Netherlands
+31.65.155.4996
S.E. Asia
Singapore
+65.6796.9500
Korea
Seoul
+82.31.736.8321
India
Chennai
+91.44.43539024
Compact Design and High Throughput
The FlexTRAK™-CD plasma system’s integrated strip handling system delivers rapid and reliable material transfer
for a wide range of strip sizes. Processing can be done from most types of magazines and carriers. The patented
chamber design and control system enable short plasma cycle times with very low overhead, ensuring that
throughput is maximized and cost of ownership is minimized.
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