TRS Advanced WB Intel Issue 02 - 第97页
Issue 2, Nov 14 TRS Advanced Maintenance 97 Calibrations

TRS Advanced Maintenance
96
Issue 2, Nov 14
Objective 25: Use of Diagnostics to test Operation
Use diagnostics to drive axes and monitor I/O’s for correct set-up and operation
Objective 26: Enable/ Disable the TRS System
Understand all TRS Software Parameters
Objective 27: Locate and Understand “timing.ini” file
Where can the “timing.ini” file be located?
Understand all configurable parameters
What should these values be?

Issue 2, Nov 14
TRS Advanced Maintenance
97
Calibrations

TRS Advanced Maintenance
98
Issue 2, Nov 14
Objective 28: Co-Planarity
Use the ASM TRS Co-Planarity Procedures Technical Bulleting 384 (TB384) to complete the
following objectives
1. Complete the Chase to Rail Cap co-planarity procedure
2. Complete the tooling co-planarity qualification baseline check.
3. Complete the Active Surround to Tooling co-planarity check
QUESTIONS:
What is the tolerance of the Chase to Rail Cap co-planarity?
What is the tolerance of the Tooling co-planarity check?
What is the next step if the tooling co-planarity is out of tolerance?
What proportion of the substrate should be above the Active Surround?
What are the next steps if the substrate is found to be either below the Active Surround or out
of tolerance above the Active Surround?