FX-3_Maintenance_Rev2_C - 第3页
Rev 2.00 i 1. ＸＹ装置 ······························································································································· ········1-1 1-1. 磁 尺的更 ·················…
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Rev 2.00
i
1.ＸＹ装置·······································································································································1-1
1-1.磁尺的更 ················································································································1-1
1-1-1.X 磁尺粘位置 ··························································································1-2
1-1-2.Y 磁尺粘位置 ··························································································1-3
1-1-3.磁尺的隙·····································································································1-4
1-2.限制感器、原点附近感器的更 ·················································································1-5
1-2-1.X＋/－LIMIT SENSOR、X NEAR SENSOR 的更···············································1-5
1-2-2.Y +LIMIT SENSOR、YB NEAR SENSOR 的更 ·················································1-6
1-3.原点感器的更·············································································································1-7
1-4.拖的更 ················································································································1-8
1-4-1.X 拖的更······························································································1-8
1-4-2.Y 拖的更······························································································1-9
2 装装置·································································································································2-1
2-1.装装置的更和更后的整····················································································
2-1
2-2.达的更 ·······················································································································2-5
2-2-1.Z 达的更·········································································································2-5
2-2-2.θ 达的更 ·········································································································2-7
2-3.Z 感器的更·················································································································2-8
2-4.激光感器（LNC60）的更······························································································2-8
2-5.装提升气缸的更 ·····································································································2-9
2-6.皮的更 ·····················································································································2-10
2-6-1.同皮 Z 的更·······························································································2-10
2-6-2.同皮θ的更 ·······························································································2-10
2-7.Z 滑的更···············································································································2-11
2-8.更装部分后的从新整·························································································2-12
3 装周部件 ·························································································································3-1
3-1.磁的更····················································································································3-1
3-2.器的更····················································································································
3-2
3-3.坏感器的更 ·········································································································3-3
3-3-1.感器部 ···············································································································3-3
3-3-2.感器高度的整 ·································································································3-4
3-3-3.放大器部 ···············································································································3-4
3-3-4.光学往放大器的安装 ······················································································3-5
3-3-5.坏感器件的定 ···············································································3-5
3-3-6.F70R 光感器放大器的手定方法定 ···························································3-6
Rev 2.00
ii
3-4.HMS 的更······················································································································3-7
3-4-1.HMS 部的更 ···································································································3-7
3-4-2.放大器的更 ········································································································3-7
3-4-3. ···················································································································3-8
3-4-4.HMS 高度整·······································································································3-8
3-5.装路板的更 ·········································································································3-9
3-6.ZT 路板的更 ·····································································································3-10
4OCC 装配 ···································································································································4-1
4-1.OCC 装配件更 ··············································································································4-1
4-2.CCD 像机、的更··································································································4-2
4-3.OCC 同／角度照明路板件的更···········································································4-3
4-4.光的更····················································································································4-4
4-5.焦整···························································································································4-6
4-6.OCC 照明的光亮整 ·······································································································4-7
4-7.更 OCC 部分后的从新整····························································································4-7
5 基板送装置 ·····························································································································5-1
5-1.送皮的更 ················································································································5-1
5-2.送皮的更·············································································································
5-2
5-3.STATION/IN/OUT/JOINT 机的更 ···········································································5-3
5-4.IN/OUT 感器的更·······································································································5-4
5-5.WAIT/STOP/C-OUT 感器的更···················································································5-5
5-5-1.光部的更 ········································································································5-5
5-5-2.放大器装置的更 ·································································································5-5
5-5-3.WAIT/STOP/C-OUT 感器的感度整 ································································5-7
5-6.止器缸筒的更·············································································································5-8
5-7.支撑台原点感器（BU 原点感器）的更·······································································5-9
5-8.T-PIN 感器的更（品） ···························································································5-9
5-9.推器Ｙ缸筒的更（外形基准） ······················································································5-10
5-10.中心的更（品） ·································································································5-11
5-11.支撑台达的更（BU 达的更） ·············································································5-12
5-11-1.矩架和支撑台达的隙 ···············································································5-12
5-11-2.支撑台用同皮的力整 ····································································
5-13
5-11-3.支撑台的平面整 ·····························································································5-13
5-12.支撑台器的更 ·····································································································5-14
5-13.后止器的更（EN 机）····························································································5-15
5-14.自基板度整·········································································································5-17
5-14-1.AWC 机的更 ···························································································5-17
5-14-2.AWC 原点感器的更····················································································5-18
5-14-3.送限制干感器的更 ···············································································5-18