FX-3_Maintenance_Rev2_C - 第4页
Rev 2.00 ii 3-4.HMS 的更 ······················································································································3-7 3-4-1.HMS 部的更 ····································…

Rev 2.00
i
1.XY装置·······································································································································1-1
1-1.磁尺的更 ················································································································1-1
1-1-1.X 磁尺粘位置 ··························································································1-2
1-1-2.Y 磁尺粘位置 ··························································································1-3
1-1-3.磁尺的隙·····································································································1-4
1-2.限制感器、原点附近感器的更 ·················································································1-5
1-2-1.X+/-LIMIT SENSOR、X NEAR SENSOR 的更···············································1-5
1-2-2.Y +LIMIT SENSOR、YB NEAR SENSOR 的更 ·················································1-6
1-3.原点感器的更·············································································································1-7
1-4.拖的更 ················································································································1-8
1-4-1.X 拖的更······························································································1-8
1-4-2.Y 拖的更······························································································1-9
2 装装置·································································································································2-1
2-1.装装置的更和更后的整····················································································
2-1
2-2.达的更 ·······················································································································2-5
2-2-1.Z 达的更·········································································································2-5
2-2-2.θ 达的更 ·········································································································2-7
2-3.Z 感器的更·················································································································2-8
2-4.激光感器(LNC60)的更······························································································2-8
2-5.装提升气缸的更 ·····································································································2-9
2-6.皮的更 ·····················································································································2-10
2-6-1.同皮 Z 的更·······························································································2-10
2-6-2.同皮θ的更 ·······························································································2-10
2-7.Z 滑的更···············································································································2-11
2-8.更装部分后的从新整·························································································2-12
3 装周部件 ·························································································································3-1
3-1.磁的更····················································································································3-1
3-2.器的更····················································································································
3-2
3-3.坏感器的更 ·········································································································3-3
3-3-1.感器部 ···············································································································3-3
3-3-2.感器高度的整 ·································································································3-4
3-3-3.放大器部 ···············································································································3-4
3-3-4.光学往放大器的安装 ······················································································3-5
3-3-5.坏感器件的定 ···············································································3-5
3-3-6.F70R 光感器放大器的手定方法定 ···························································3-6
Rev 2.00
ii
3-4.HMS 的更······················································································································3-7
3-4-1.HMS 部的更 ···································································································3-7
3-4-2.放大器的更 ········································································································3-7
3-4-3. ···················································································································3-8
3-4-4.HMS 高度整·······································································································3-8
3-5.装路板的更 ·········································································································3-9
3-6.ZT 路板的更 ·····································································································3-10
4OCC 装配 ···································································································································4-1
4-1.OCC 装配件更 ··············································································································4-1
4-2.CCD 像机、的更··································································································4-2
4-3.OCC 同/角度照明路板件的更···········································································4-3
4-4.光的更····················································································································4-4
4-5.焦整···························································································································4-6
4-6.OCC 照明的光亮整 ·······································································································4-7
4-7.更 OCC 部分后的从新整····························································································4-7
5 基板送装置 ·····························································································································5-1
5-1.送皮的更 ················································································································5-1
5-2.送皮的更·············································································································
5-2
5-3.STATION/IN/OUT/JOINT 机的更 ···········································································5-3
5-4.IN/OUT 感器的更·······································································································5-4
5-5.WAIT/STOP/C-OUT 感器的更···················································································5-5
5-5-1.光部的更 ········································································································5-5
5-5-2.放大器装置的更 ·································································································5-5
5-5-3.WAIT/STOP/C-OUT 感器的感度整 ································································5-7
5-6.止器缸筒的更·············································································································5-8
5-7.支撑台原点感器(BU 原点感器)的更·······································································5-9
5-8.T-PIN 感器的更(品) ···························································································5-9
5-9.推器Y缸筒的更(外形基准) ······················································································5-10
5-10.中心的更(品) ·································································································5-11
5-11.支撑台达的更(BU 达的更) ·············································································5-12
5-11-1.矩架和支撑台达的隙 ···············································································5-12
5-11-2.支撑台用同皮的力整 ····································································
5-13
5-11-3.支撑台的平面整 ·····························································································5-13
5-12.支撑台器的更 ·····································································································5-14
5-13.后止器的更(EN 机)····························································································5-15
5-14.自基板度整·········································································································5-17
5-14-1.AWC 机的更 ···························································································5-17
5-14-2.AWC 原点感器的更····················································································5-18
5-14-3.送限制干感器的更 ···············································································5-18
Rev 2.00
iii
6CAL ········································································································································6-1
6-1.CAL 基板件的更·····································································································6-1
7ATC ············································································································································7-1
7-1.气缸的更 ·······················································································································7-1
7-2.ATC OPEN/CLOSE 感器的更 ···················································································7-2
7-3.速度控制器的整·············································································································7-2
8 供料器 ž 一次更台(品)·······························································································8-1
8-1.整体 ······························································································································8-1
8-2.汽缸的更 ················································································································8-2
8-3.气缸的速度控制整··································································································8-3
8-4.供料器基板的更·············································································································8-3
8-5.供料器上升气缸的更 ·····································································································8-4
8-6.供料器上升气缸的速度控制整(品、一次更台)·····················································8-5
8-7.供料器上升感器的更(品、一次更台) ························································8-5
8-8.器的更(品、一次更台) ·················································································8-6
8-9.杆的更(品、一次更台) ·················································································
8-6
8-10.供料器 PCB 基板更 ·····································································································8-7
9 空气机器 ····································································································································9-1
9-1.数字力(正)的更 ······························································································9-1
9-2.清器的更····················································································································9-3
9-3.数字力()的更 ······························································································9-4
9-4.真空零件的更·············································································································9-6
10SW ·····································································································································10-1
10-1.按的更 ············································································································10-1
10-2.急停止的更 ·····································································································10-2
10-3.罩打的更 ·····································································································10-3
10-4.按的更(CE 机) ························································································10-5
11 供料器浮感器的更·整 ·······························································································11-1
12 其它机器 ································································································································12-1
12-1.LCD器的更 ········································································································12-1
12-2.系的更················································································································
12-7
12-2-1.SSD 的更·······································································································12-7
12-2-2.HDD 的更方法 ·······························································································12-9
12-2-3.BIOS 的定····································································································12-10
12-2-4.网的置(要与 HLC 或 IS 通信的情况下行置)······································12-16
12-2-5.FX-3 系程序和 Flexline DB 的安装·······························································12-25
12-2-6.系版本升要 ···························································································12-36