SI-P750_PL_5th.pdf.pdf - 第106页
添付資料 1 空圧回路図 Appendix 1 Pneumatic Circuit diagram AP-1-1 Filter regulator unit INA-17-302-03 Three-direction valve Filter regulator AW4000-03BG (SMC) Pressure switch V/C 3/8 Silencer P R R Cleaning (upper/under) Front si…
部品コード 部 品 名 Serial 個数 仕 様 メーカー
Parts Code Parts Name No. Q'ty Specification Maker
1-835-248-12 (S) I/O ｹ-ﾌﾞﾙ (3) X019,X027
1 CABLE, (S) I/O (3) 1 X028,X029 S
1-835-249-12 (S) I/O ｹ-ﾌﾞﾙ (4)
2 CABLE, (S) I/O (4) 1 X030,X031 S
1-835-250-12 (S) I/O ｹ-ﾌﾞﾙ (6)
X114,X115,X116
3 CABLE, (S) I/O (6) 1
X117,X118,X119,X131
1-835-251-12 (S) I/O ｹ-ﾌﾞﾙ (7) X101,X102
4 CABLE, (S) I/O (7) 1 X104,NOG11 S
1-835-252-12 (S) I/O ｹ-ﾌﾞﾙ (12)
5 CABLE, (S) I/O (12) 1 X120,CCWL5
1-835-253-12 (S) I/O ｹ-ﾌﾞﾙ (13)
6 CABLE, (S) I/O (13) 1 X130
1-835-254-12 (S) I/O ｹ-ﾌﾞﾙ (14)
7 CABLE, (S) I/O (14) 1 Y313
イラスト
番号
Ref.No.
備 考
Remarks
ハーネス部(6/6)
Electric wiring(6/6)
11-8
11-8-2
添付資料1 空圧回路図
Appendix 1 Pneumatic Circuit diagram
AP-1-1
Filter regulator unit
INA-17-302-03
Three-direction valve
Filter regulator
AW4000-03BG
(SMC)
Pressure switch
V/C
3/8
Silencer
P
R
R
Cleaning (upper/under)
Front side
(
Two Sensors
)
Air block manifold
Back side
Front cover (upper/under)
(2x)
CJ2B16-175
(SMC)
Main unit
CDQSB25
-125DC
-F9NUL
(SMC)
CDQ2A80-125DCM
(SMC)
Table unit (upper/under)
Table unit
Squeeze (left)
Squeeze unit
MQQTB20-50
(SMC)
MQQTB20-50
(SMC)
Squeeze (right) PCB stopper/ retainer
Camera unit
Y clamp
Stage conveyor unit
Dry cleaning (upper/under)
Cleaning unit
Reformer (upper/under)
Stage conveyor unit
Reformer (front/back)
Main unit
Screen stopper
PCB vacuum unit
CDQSB25
-125DC
(SMC)
PCB blow
PCB cleaning unit
Loading stopper
Loading conveyor unit
InterlockStage C/U width lockCleaning unit solvent
P
2kg/cm
2
4kg/c
m
2
8kg/c
m
2
4kg/c
m
2
4kg/c
m
2
4kg/c
m
2
4kg/c
m
2
8kg/c
m
2
Manifold for PCB absorption
φ
2x3
Teflon tube
Teflon tube
Teflon tube
Teflon tube
φ
1.5x2.5
φ
2x3
Teflon tube
φ
2x3
Teflon tube
φ
3x4
Teflon tube
φ
3x4
Front side
Front side
Front side
Back side
B
A
P
B
A
P
B
A
P
B
A
P
B
A
P
B
A
P
B
A
P
B
A
P
B
A
B
A
P
B
A
P
B
A
P
B
A
P
φ
6.38x9.53
7
47
27 27
11
13
29
27
10
27
26
44
51
540
50
50
50
49
46
537
50
537
46
45
50 50
19
29
19
29
19
28
19
28
17
17
22
22
16
16
18 18
2
39
40
31
22
22
27
27
10
27
27
10
63 5
14
14
14
14
15 15
40 29 40 29
41
29
33
14
14
41
29
33
27 27
10
13
29
27
27 27
13
29
27
36 36
36
62
36
62
61
15
15
61
10
1
15
43 43
42
42
42
42
40
40
40
40
40
40
29
29
29
29 29
29
29
15 15
15
15
61
61
15
29
29
3
55
62
54 55 55
36 36
55
55
62
54
55
36 36
55
54 55
36
55
55
36
55
54
55
36 36
15 15 15 15
61 61
62
62
36 36
36
36
40
40
40
34 29
34 29
40 34 29
34 29
34
29
29
34
29
34
29
34
14 14
56
43
3
62
28
62
62
60
58 57
62
28
62
62
60
5758
59
64
6
35
38
37
4
12
29
27
9
26
26
8
3230
25 24 23 23
23
39
2626
10
12
29
27
Back side
VHS400-03
(SMC)
ISE40-01-25L
(SMC)
AN403-03
(SMC)
BMSN5-22
(MISUMI)
MGPL12-20-Y59A3
(SMC)
CDU10-5D-F9NVSL
(SMC)
MXQ8-20CS-F9NL
(SMC)
(SMC)
(SMC)
MXQ8-20CS
(SMC)
CQSB12-5D
(SMC)
CQSB12-20D
(SMC)
CQSB20-10
(SMC)
MGPL12-20-Y5PA
(SMC)
CQSB12-5S
CQSB12-5S
CDJ2D10-15S
ZL112-K25MZ
(SMC)
Digital pressure sensor
ZSE40-01-22L
(SMC)
Manifold valve type: SS5X3-45PD-12B-C4 (SMC)
Stepped ejector
(with valves)
Miniature regulator
ARJ210-M5BG
(SMC)
20
6
6
6
6
6
6
6
8
8
8
8
8
8
4
4
4
4
4
4
4
4 4
4
4
4
4 4
4
4
4
4
4
4
3
3
3
3
3 3
10
12
12
12
10
10
8
8
6
6
6
部品コード 部 品 名 Serial 個数 仕 様 メーカー
Parts Code Parts Name No. Q'ty Specification Maker
2-025-452-01 マニホールドバルブ 1001-
1
S-1042-1801
VALVE MANIFOLD -1256 1
SS5X3-45PD-12B-C4
SMC S
1-455-055-11 マニホールド
1 MANIFOLD (SS5Q13-13-X924) 1 SS5Q13-13-X924 SMC
1-480-732-12 (S)バルブASSY (Y314,Y315)
2
S-1042-1802
VALVE ASSY, (S) (Y314,Y315) 1 SX7240-5GZ-03 SMC
4-712-992-21 減圧弁(ARJ210-M5BG)
3
S-1042-1803
VALVE, REDUCING (ARJ210-M5BG)
1 ARJ210-M5BG SMC S
1-480-731-11 (S) ﾊﾞﾙﾌﾞ ASSY (Y316)
4
S-1042-1804
VALVE ASSY, (S) (Y316) 1 ZL112-K25MZ SMC S
1-480-737-11 (S)圧力センサーASSY (X114)
5
S-1042-1805
SENSOR ASSY, (S) PRESSURE (X114)
1 ISE30-01-25ML SMC S
1-480-736-11 (S)圧力センサーASSY (X032)
6
S-1042-1805
SENSOR ASSY, (S) PRESSURE (X032)
1 ZSE30-01-25ML SMC S
2-023-684-01 フィルタレギュレータ AW30-02B
7
S-1042-1807
REGULATOR FILTER(AW30-02B) 1 AW30-02B SMC S
2-023-685-01
エア用ブロックマニホールド BMSN4-22
8
S-1042-1808
MANIFOLD AIR BLOCK(BMSN4-22) 1 BMSN4-22 MISUMI S
2-023-682-01 精密レギュレータ (IR1020-01)
9
S-1042-1809
REGULATOR PRECISION (IR1020-01)
1 IR1020-01 SMC S
2-023-682-11 精密レギュレータ (IR1010-01)
10
S-1042-1810
REGULATOR PRECISION (IR1010-01)
6 IR1010-01 SMC S
2-023-682-21 精密レギュレータ IR1000-01-BG
11
S-1042-1811
REGULATOR PRECISION (IR1000-01-BG)
1 IR1000-01-BG SMC S
2-023-706-01 圧力計 (G36-10-01M)
12
S-1042-1812
GAUGE PRESSUER (G36-10-01M) 2 G36-10-01M SMC S
2-023-706-11 圧力計 (G36-4-01M)
13
S-1042-1813
GAUGE PRESSUER (G36-4-01M) 3 G36-4-01M SMC S
4-714-782-21 ｽﾋﾟ-ﾄﾞ ｺﾝﾄﾛ-ﾗ (AS1201F-M5-04S)
14
S-1042-1814
CONTROLLER, SPEED(AS1201F-M5*)
8 AS1201F-M5-04S SMC
4-708-047-01 ｽﾋﾟ-ﾄﾞ ｺﾝﾄﾛ-ﾗ (AS1001F-04)
15
S-1042-1815
CONTROLLER (AS1001F-04), SPEED
14 AS1001F-04 SMC
2-023-707-01 スピコン AS4000-03
16
S-1042-1816
CONTROL SPEED(AS4000-03) 2 AS4000-03 SMC
2-023-708-01 ニップル 3/8
17
S-1042-1817
NIPPLE(3/8) 2 3/8 JIS
4-712-681-21 ｻｲﾚﾝｻ (AN303-03)
18
S-1042-1818
SILENCER (AN303-03) 2 AN303-03 SMC
4-701-306-02 サイレンサー(AN120-M5)
19
S-1042-1819
SILENCER(AN120-M5) 4 AN120-M5 SMC
イラスト
番号
Ref.No.
備 考
Remarks
添付資料1 空圧回路図
Appendix 1 Pneumatic Circuit diagram
AP-1-2