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15 6.4 .1 校准错误 .... ........ ......... ......... ....... ......... ......... ......... ....... ......... ......... ....... ......... ..... 6-17 第 7 章 7 故障排除 .... ........... ........... .......... ........... ...........…

3.1 安装・转移方法 ................................................................................................................... 3-2

3.1.1 安装空间 ................................................................................................................ 3-2

3.1.2 搬入搬出口外盖 ..................................................................................................... 3-3

3.2 电源连接 .............................................................................................................................. 3-4

3.2.1 电源连接步骤 ......................................................................................................... 3-5

第4章 4 日常运行 .................................................................................................... 4-1

4.1 上电与断电 .......................................................................................................................... 4-2

4.1.1 上电........................................................................................................................ 4-2

4.1.2 断电........................................................................................................................ 4-4

4.2 打开或关闭正面门 ............................................................................................................... 4-6

第5章 5 日常检查 .................................................................................................... 5-1

5.1 上电前的检查 ...................................................................................................................... 5-2

5.1.1 装置外围检查 ......................................................................................................... 5-2

5.1.2 装置内部的检查 ..................................................................................................... 5-2

5.1.3 确认供电电源 ......................................................................................................... 5-3

5.2 上电后的检查 ...................................................................................................................... 5-4

5.2.1 外围设备的检查 ..................................................................................................... 5-4

5.2.2 紧急停止功能检查 .................................................................................................. 5-4

5.2.3 运行中的异常检查 .................................................................................................. 5-4

5.3 日常检查确认表 ................................................................................................................... 5-5

第6章 6 定期检修及保养 ......................................................................................... 6-1

6.1 易耗品的更换 ...................................................................................................................... 6-2

6.1.1 易耗品一览............................................................................................................. 6-2

6.1.2 传送带的更换 ......................................................................................................... 6-2

6.1.3 UPS 电池的更换 .................................................................................................... 6-5

6.1.4 PLC 电池的更换..................................................................................................... 6-9

6.2 驱动系统上油 .................................................................................................................... 6-10

6.2.1 润滑脂加注枪 ....................................................................................................... 6-10

6.2.2 上油方法 .............................................................................................................. 6-10

6.3 各部分的清洁 .................................................................................................................... 6-13

6.3.1 装置内部的清洁 ................................................................................................... 6-13

6.3.2 传送带的清洁 ....................................................................................................... 6-13

6.3.3 照明扩散板的清洁 ................................................................................................ 6-14

6.3.4 镜头的清洁........................................................................................................... 6-15

6.3.5 基板检测传感器的清洁 ........................................................................................ 6-16

6.3.6 白色板的清洁 ....................................................................................................... 6-16

6.4 照明校准方法 .................................................................................................................... 6-17

6.4.1 校准错误 .............................................................................................................. 6-17

第7章 7 故障排除 .................................................................................................... 7-1

7.1 异常时的对策 ...................................................................................................................... 7-2

7.1.1 紧急停止开关的使用方法 ....................................................................................... 7-2

7.1.2 基板卡住时的取出方法 .......................................................................................... 7-2

7.1.3 强制通过模式的使用方法 ....................................................................................... 7-2

第8章 8 保管・废弃 ................................................................................................ 8-1

8.1 保管、废弃 .......................................................................................................................... 8-2

8.1.1 保管场所 ................................................................................................................ 8-2

8.1.2 废弃........................................................................................................................ 8-2

1-1

1 概要

1.1 本装置概要 ...................................................... 1-2

1.1.1 外观尺寸图 ................................................. 1-2

1.1.2 系统框图 ..................................................... 1-3

1.2 各部分名称 ...................................................... 1-4

1.2.1 装置外观名称 ............................................. 1-4

1.2.2 正面门内部名称 .......................................... 1-6

1.2.3 机柜内部名称 ............................................. 1-7

1.2.4 外部 I/F 连接部名称 .................................... 1-8