5OM-1841-001w_F8S - 第74页
5OM-1841 2-B 1605-001
5OM-1841
2-A
1605-001
5OM-1841
2-B1605-001
2-1-1
5OM-1841
Vacuum Pump
Front View
Manifold 1
Manifold 2
Vacuum/collective
disposal valve
Air Supply 2
Air Supply 1
Ｓ144
Ｍ66
Ｙ0938
Ｙ0939
Vacuum/collective
disposal valve
Ｙ0638
Ｙ0639
1605-001
Symbol Name Symbol Name
M66 Vacuum Pump
Y0638 Vacuum/Collective Disposal Change-Over Y0938 Vacuum/Collective Disposal Change-Over
Y0639
High-Speed/Multi-Functional Head Change-Over
Y0939
High-Speed/Multi-Functional Head Change-Over
S141 Air Pressure Drop Detection