5OM-1841-001w_F8S - 第75页
2-1-1 5OM-1841 V acuum Pump Front V iew Manifold 1 Manifold 2 V acuum/collective disposal valve Air Supply 2 Air Supply 1 Ｓ 144 Ｍ 66 Ｙ 0938 Ｙ 0939 V acuum/collective disposal valve Ｙ 0638 Ｙ 0639 1605-001 Sy…
5OM-1841
2-B1605-001
2-1-1
5OM-1841
Vacuum Pump
Front View
Manifold 1
Manifold 2
Vacuum/collective
disposal valve
Air Supply 2
Air Supply 1
Ｓ144
Ｍ66
Ｙ0938
Ｙ0939
Vacuum/collective
disposal valve
Ｙ0638
Ｙ0639
1605-001
Symbol Name Symbol Name
M66 Vacuum Pump
Y0638 Vacuum/Collective Disposal Change-Over Y0938 Vacuum/Collective Disposal Change-Over
Y0639
High-Speed/Multi-Functional Head Change-Over
Y0939
High-Speed/Multi-Functional Head Change-Over
S141 Air Pressure Drop Detection
2-1-2
5OM-1841
POWER ON
START
STOP
PNL CHANGE
B
D A
S101
H101
S102
H102
S103
S104
H104A
H104B
S105
C
Opration Panel
Emergency Stop
Operation Switch
1605-001
Symbol Name Symbol Name
S101 POWER ON PB
H101 POWER ON LED
S102 START
H102 START LED
S103 STOP
H104B LOCK LED
S104 PNL CHANGE
H104A PNL CHANGE LED
S105 Emergency Stop Operation Switch