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• EUV lithography in HVM • Background and History • EUV Lithography with NXE:3400B • Principles of EUV Generation • EUV Source: Architecture • EUV Sources in the Field • Source Power Outlook • Summary Outline Slide 2 Pub…
Source Workshop, Amsterdam, November 5
th
2019
EUV Source for Lithography in HVM:
performance and prospects
Igor Fomenkov
ASML Fellow
• EUV lithography in HVM
• Background and History
• EUV Lithography with NXE:3400B
• Principles of EUV Generation
• EUV Source: Architecture
• EUV Sources in the Field
• Source Power Outlook
• Summary
Outline
Slide 2
Public
Slide 3
And it’s here: we see EUV - enabled chips in 2019
EUV up and running in High Volume Manufacturing
Public