5OM-1075-002.pdf - 第39页
Section 3 Location of Sensors and Loads 0308-002 -(M750JF---2101) 3-4 AHB01EMTP Layout of Sensors and Loads (Nozzle Stocker (B1)) Lifted Nozzle Detection B1 Nozzle Stocker B1 Closing Check Nozzle Stocker B1 Opening Check…
Section 3 Location of Sensors and Loads
0107-001-(M750JC---2102) 3-3 AHB01EMTP
Layout of Sensors and Loads (Beam (X Axis))
Section 3 Location of Sensors and Loads
0308-002 -(M750JF---2101) 3-4 AHB01EMTP
Layout of Sensors and Loads (Nozzle Stocker (B1))
Lifted Nozzle Detection B1
Nozzle Stocker B1 Closing Check
Nozzle Stocker B1 Opening Check
Nozzle Stocker B1 Open
Nozzle Stocker B1 Closed
Symbol Name
-BPH061
-BPH062
-BPH063
-YSV12A
-YSV12B
Note
Section 3 Location of Sensors and Loads
0107-001-(M750JF---2102) 3-5 AHB01EMTP
Layout of Sensors and Loads (Nozzle Stocker (B2))